FWPX Specifications

Sample cooling assembly

Type: 2-stage flow cryostat (sample + radiation shield)
Radiation shielding: Radiation shield with top viewport surrounds sample
Cooling source: Liquid helium (LHe) or liquid nitrogen (LN2)
   

Magnetic field:

 Not an option

Temperature1

Base temperature Control range Configuration
4.5 K 5 K to 475 K Up to 6 probe arms installed
3.5 K 4 K to 475 K with PS-LT option

1Base temperature assumes heat load for probes thermally anchored as listed in probing section

Control stability

Sample stage temperature Helium stability Nitrogen stability
Base temperature (no heater control) ±20 mK ±20 mK
<10 K ±50 mK —
10 K to 100 K ±20 mK ±50 mK
101 K to 250 K ±20 mK ±50 mK
251 K to 350 K ±20 mK ±100 mK
351 K to 475 K ±50 mK ±100 mK

Vacuum

Standard TPS-FRG
Pump down time 30 min
(to reach <1 × 10-3 Torr)
Room temperature <5 × 10-4 Torr
Helium base temperature <1 × 10-5 Torr
Maximum temperature <5 × 10-3 Torr

Cycle time (LHe):

 3.5 h
Vacuum pump down: 0.5 h
Station cooldown: 1.5 h
Station warmup: 1.5 h

Vibration at sample:

 <30 nm standard

Sample

  
Maximum sample size: 102 mm (4 in) diameter
Sample backside optical access: Not an option
Sample rotation: ±5° in-plane rotation
Sample translation: Translation in x- and y-axis for full 102 mm (4 in) wafer probing

Probing configurations

  
Maximum probes: 6
Probe arm sensor: Included for monitoring probe temperature
Cooled probe mounts: <30 K with sample at base temperature
Probe mount: Thermally anchored to sample stage
Probe arm: Thermally anchored to radiation shield
DC/RF probes and DC/RF flexible probes: Electrical isolation >100 GΩ for low leakage measurements
Microwave probes: Frequency range DC up to 67 GHz for RF measurements
Fiber optic probes: Available for electro-optical measurements
Probe landing: All probes can land at single point in a 51 mm (2 in) diameter circle

Cryogen consumption2
Room to base temperature (total): 10 liquid L helium; 6 liquid L nitrogen
Helium at 5 K: <5 liquid L/h
Nitrogen at 80 K: <0.5 liquid L/h

2Assumes maximum number of probe arms installed

Station details

Temperature equipment
Sample stage sensor/heater power: DT-670-CU-HT calibrated silicon diode/100 W
Radiation shield sensor/heater power: DT-670C-CU silicon diode/100 W
Probe arm: DT-670C-SD silicon diode (on one probe arm)/no active control
Electronics console:
Temperature controllers: Two Model 336s
Helium transfer line: Large bore S-style helium/nitrogen transfer line with flow control 12.7 mm (0.5 in) top port withdrawal
   

Included sample holder:

 Removable SH-4.00-G, 102 mm (4 in) maximum sample size, grounded
   

Station footprint:

 1067 mm (42 in) width × 851 mm (33.5 in) depth (does not include console)
   

Vacuum chamber
Material: Electroless nickel-plated aluminum
Overall size: 406 mm (16 in) outer diameter × 178 mm (7 in) tall
Chamber access: 330 mm (13 in) diameter opening
Viewport: 102 mm (4.0 in) diameter fused quartz
Viewing area: 91 mm (3.6 in) diameter
Pump port: NW 40 with included vacuum isolation valve
Gauge port: NW 25
Gas port: 0.25 in NPT with valve
Over pressure safety: 3.5 kPa (0.5 psi) pressure relief valve
   

Radiation shielding
Material: Electroless nickel-plated aluminum
Sample access: 180 mm (7.1 in) diameter lid
Viewport: 159 mm (6.25 in) diameter IR absorbing window
Viewing area: 152 mm (6.0 in) diameter
   

Vision system
   

Included kits
Tool kit: Included tools for standard operation
Spares kit: Included kit for common consumable items
Probe starter kit: ZN50R-25-W (qty 2), ZN50R-25-BECU (qty 2), and ZN50R-CVT-25-W (qty 2) for training
   

Utilities
1-phase voltage: 100/120/220/240 VAC (+5%, -10%), 50/60 Hz
1-phase power: 2 kVA recommended
3-phase voltage: Not required
3-phase power: Not required
Cooling water: Not required
   

 

Back to the FWPX overview

Probing configurations

Vision system

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