FWPX cryogenic probe station

FWPX cryogenic probe station

FWPX large-size wafer probe station features

  • Largest wafer sample size: 4 in
  • Sample translation for rapid probing
  • Customizable to accept 6 in wafers

Optional configurations

Click here for detailed option descriptions

Low temperature option   Low temperature (PS-LT-CPX)
Read our tech note: 'A New Approach to Low-Level Measurements of  Nanostructures'
FWPX vacuum chamber and radiation shields

Lake Shore’s FWPX probe station is designed for researchers who require large-size wafer probing. The FWPX accommodates wafers up to 102 mm (4 in) in diameter and can be modified to accept up to 152 mm (6 in) wafers. This general-purpose probe station is designed for researchers or engineers conducting material characterization tests over large samples. It is also an effective unit for measuring organic materials.

The FWPX employs a continuous refrigeration system using either liquid helium or liquid nitrogen for wafer cooling. It operates over a temperature range of 4.5 K to 475 K with the option to extend the base temperature to 3.5 K. I-V, C-V, and microwave measurements are standard. The station is configurable with up to six thermally anchored micro-manipulated probe arms and is optimally designed for electro-optical testing.


Sample holders

Probing configurations

Vision system

Sample temperature accuracy is key

Includes PC with MeasureLINK software

Download the probe station catalog