Cryogenic Probe Stations

Learn more about the new THz probe arm available for select probe stationsModel PS-100 fully configured entry-level probe stationUpgrade your probe station to a cryogen-free model



Model
Magnet field
Max probe arms
Standard Temperature
range
Optional
High Temperature
Optional
Low Temperature
Max sample size
Vacuum
Sample stage rotation
Optional
THz probe arm
Cryogen-Free Cryogenic Probe Stations
CRX-EM-HF
0.6 T horizontal field electromagnet
4
8 K to 400 K
25 mm (1 in) diameter
10-5 Torr
±360° (optional)
CRX-VF
2.5 T vertical field superconducting magnet
6
10 K to 500 K,
<10 K to 400 K
with load-lock
51 mm (2 in) diameter
10-5 Torr standard,
10-7Torr optional
check 
CRX-4K
6
4.5 K to 350 K
20 K to 675 K
51 mm (2 in) diameter
10-5 Torr
check 
CRX-6.5K
6
<10 K to 350 K
20 K to 675 K
51 mm (2 in) diameter
10-5 Torr
Cryogenic Probe Stations
FWPX
6
4.5 K to 475 K
3.5 K
102 mm (4 in) diameter
10-5 Torr
±5°
EMPX-H2
0.6 T horizontal field electromagnet
4
4.5 K to 400 K;
8 K to 400 K with 360° rotation option
3.2 K
25 mm (1 in) diameter
10-5 Torr
±360° (optional)
CPX-HF
1 T horizontal field superconducting magnet
4
4.2 K to 400 K
2 K
25 mm (1 in) diameter
10-5 Torr standard,
10-7 Torr optional
±5°
CPX-VF
2.5 T vertical field superconducting magnet
6
4.2 K to 400 K,
<10 K to 400 K
with load-lock
2 K
51 mm (2 in) diameter
10-5 Torr standard,
10-7 Torr optional
±5°
check 
CPX
6
4.2 K to 475 K,
<10 K to 400 K
with load-lock
20 K to 675 K
Cannot be used with load-lock sample assembly

Low temp: 1.9 K
Very low temp: 1.6 K

51 mm (2 in) diameter
12.7 mm (0.5 in) with load-lock
10-5 Torr standard,
10-7 Torr optional
±5°
check 
TTPX
6
4.2 K to 475 K
20 K to 675 K
3.2 K
51 mm (2 in) diameter
10-5 Torr
PS-100
4*
4.2 K to 475 K
20 K to 675 K
3.2 K
32 mm (1.25 in) diameter*
10-5 Torr
*As currently configured. The PS-100 can be field upgraded to six probe arms and support larger sample sizes by selecting optional equipment from the TTPX probe station family. Download the PDF version


Features of the Model TTPX Tabletop Probe Station

  • Entry-level system
  • Compact table-top design
  • Affordable
  • Rapid cooldown and warmup
  • Backside optical access

Features of the Model CRX-VF Cryogen-free Vertical Field Superconducting Magnet Probe Station

  • Cryogen-free operation
  • Allows unsupervised cooldown
  • Standard probing plus out-of-plane vertical field superconducting magnetic measurements
  • True 90° probing
  • Customizable up to 3 T with specialized probes
  • Customizable to make Hall measurements
  • THz probe arm option for precise on-wafer contact probing of millimeter wave devices at THz frequencies (75 GHz and up)

Features of the Model PS-100 tabletop probe station

  • Fully specified, preconfigured entry-level system
  • Compact table-top design with four-arm triaxial configuration
  • Affordable, simple to order, rapidly shipped
  • Just add cryogen and vacuum pump
  • Can be field upgraded for other TTPX capabilities

Features of the Model CPX High Performance Probe Station

  • Lake Shore’s most versatile probe station
  • Numerous options and configurations available
  • Multiple radiation shields for best low temperature performance
  • Minimize sample condensation during cool-down
  • Customizable for sample transfer with no exposure to atmosphere
  • Customizable to accommodate a 4 in wafer
  • THz probe arm option for precise on-wafer contact probing of millimeter wave devices at THz frequencies (75 GHz and up)

Features of the Model CPX-HF Superconducting Magnet-based Horizontal Field Probe Station

  • Standard probing plus in-plane horizontal field superconducting magnetic measurements
  • Multiple radiation shields for best low temperature performance
  • Minimize sample condensation during cool-down
  • True 90° probing

Features of the Model CPX-VF Superconducting Magnet-based Vertical Field Probe Station

  • Standard probing plus out-of-plane vertical field superconducting magnetic measurements
  • Multiple radiation shields for best low temperature performance
  • Minimize sample condensation during cool-down
  • True 90° probing
  • Customizable for Hall measurements
  • Customizable up to 3 T with specialized probes
  • THz probe arm option for precise on-wafer contact probing of millimeter wave devices at THz frequencies (75 GHz and up)

Features of the Model EMPX-H2 Electromagnet-based Horizontal Field Probe Station

  • Standard probing plus in-plane horizontal field electromagnetic measurements
  • Generate full field without cryogen or cooldown
  • Probes configured at 30° angles to accommodate electromagnet

Features of the Model FWPX Large-size wafer probe station

  • Largest wafer sample size: 4 in
  • Sample translation for rapid probing
  • Customizable to accept 6 in wafers

Features of the Model CRX-4K High Performance Closed Cycle Refrigerator-based Probe Station

  • Cryogen-free operation
  • Allows unsupervised cool down
  • Low temperature operation
  • Minimize sample condensation during cooldown
  • Customizable to accommodate a 102 mm (4 in) wafer
  • THz probe arm option for precise on-wafer contact probing of millimeter wave devices at THz frequencies (75 GHz and up)

Features of the Model CRX-6.5K Affordable Cryogen-free Probe Station

  • Cryogen-free operation
  • Push-button operation and allows unsupervised cooldown
  • Affordability

Features of the Model CRX-EM-HF Cryogen-free Horizontal Field Electromagnet Probe Station

  • Cryogen-free operation
  • Allows unsupervised cool down
  • Standard probing plus in-plane horizontal field electromagnetic measurements
  • Generate full field without cooldown
  • Probes configured at 30° angles to accommodate electromagnet
  • Optional 360° rotation

Lake Shore and Cascade Microtech are collaborating to deliver a complete range of measurement solutions all along the spectrum from cryogenic/magnetic materials science to automated probing of production-ready devices.

Take advantage of our combined best-of-breed probe system technology and application know-how.

Probe station features by model

Lake Shore’s probe station family features many configuration options to cover the requirements of a broad range of applications. Use the table below to identify any specific features needed and the probe station models that best meet these needs.

Lake Shore probe station configurations


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