Vision system

The probe station’s vision system is critical for distinguishing characteristics of the sample and properly landing probes. The standard Zoom 70 vision system implements 7:1 zoom optics with a high sensitivity, high definition camera and high-resolution monitor. The HD camera is specifically chosen for low light sensitivity to minimize the lighting required for high image quality. The choice of an appropriate lighting type is especially important for sample visualization because it strongly influences the behavior of the vision system. Therefore, Lake Shore includes both coaxial light and ring light illumination standard with the vision system.

The 1951 USAF glass slide resolution target images shown to the right demonstrate the smallest feature resolved for both the standard and optional vision system. Optical analysis of the images show the improved resolving power of the optional Zoom 125 vision system. Based on the optical analysis, the smallest feature that can be visualized in each probe station model is summarized to the right. The EMPX-H2 and FWPX probe station models have a longer working distance than the other stations, requiring an alternative lens in the optics.

Z70 optics packageComparison of Zoom 70 and Zoom 160 optics packages

Smallest features visualized in the two optics packages

Probe station modelStandard Zoom 70 smallest visualized featureOptional Zoom 125 smallest visualized feature
TTPX/PS-1003.1 µm<2.5 µm
CPX3.1 µm<2.5 µm
CPX-VF3.1 µm<2.5 µm
EMPX6.2 µm
FWPX6.2 µm
CRX-6.5K3.1 µm<2.5 µm
CRX-4K3.1 µm<2.5 µm
CRX-VF3.1 µm<2.5 µm
CRX-EM-HF3.1 µm<2.5 µm