Cryogenic probe stations
Model | Magnet field | Max probe arms | Standard temperature range | Optional high temperature | Optional low temperature | Max sample size | Vacuum | Sample stage rotation |
Cryogen-free cryogenic probe stations | ||||||||
CRX-EM-HF | 0.6 T horizontal field electromagnet | 4 | 8 K to 420 K | — | — | 25 mm (1 in) diameter | 10‑5 Torr | ±360° (optional) |
CRX-VF | 2.5 T vertical field superconducting magnet | 6 | 10 K to 420 K | — | — | 51 mm (2 in) diameter | 10‑5 Torr standard, 10‑7 Torr optional | — |
Need Hall measurements? Get the CRX-VF with PS-HM-8425 Hall measurement package | ||||||||
CRX-4K | — | 6 | 4.5 K to 350 K | 20 K to 675 K | — | 51 mm (2 in) diameter | 10‑5 Torr | — |
CRX-6.5K | — | 6 | <10 K to 350 K | 20 K to 675 K | — | 51 mm (2 in) diameter | 10‑5 Torr | — |
Cryogenic probe stations | ||||||||
FWPX | — | 6 | 4.5 K to 420 K | — | 3.5 K | 102 mm (4 in) diameter | 10‑5 Torr | ±5° |
EMPX-H2 | 0.6 T horizontal field electromagnet | 4 | 4.5 K to 420 K; 8 K to 420 K with 360° rotation option | — | 3.2 K | 25 mm (1 in) diameter | 10‑5 Torr | ±360° (optional) |
CPX-VF | 2.5 T vertical field superconducting magnet | 6 | 4.2 K to 420 K, <10 K to 420 K with load-lock | — | 2 K | 51 mm (2 in) diameter | 10‑5 Torr standard, 10‑7 Torr optional | ±5° |
CPX | — | 6 | 4.2 K to 420 K, <10 K to 420 K with load-lock | — | Low temp: 1.9 K Very low temp: 1.6 K | 51 mm (2 in) diameter; 12.7 mm (0.5 in) with load-lock | 10‑5 Torr standard, 10‑7 Torr optional | ±5° |
TTPX | — | 6 | 4.2 K to 420 K | 20 K to 675 K | 3.2 K | 51 mm (2 in) diameter | 10‑5 Torr | — |
PS-100 | — | 4* | 4.2 K to 420 K | — | 3.2 K | 32 mm (1.25 in) diameter* | 10‑5 Torr | — |
Custom probe stations | ||||||||
*As currently configured. The PS-100 can be field upgraded to six probe arms and support larger sample sizes by selecting optional equipment from the TTPX probe station family. |
- Fully specified, preconfigured entry-level system
- Compact tabletop design with four-arm triaxial configuration
- Affordable, simple to order, rapidly shipped
- Just add cryogen and vacuum pump
- Can be field upgraded for other TTPX capabilities
- Entry-level system
- Compact tabletop design
- Affordable
- Rapid cooldown and warmup
- Backside optical access
- Lake Shore’s most versatile probe station
- Numerous options and configurations available
- Multiple radiation shields for best low-temperature performance
- Minimize sample condensation during cool-down
- Customizable for sample transfer with no exposure to atmosphere
- Customizable to accommodate a 4 in wafer
- Standard probing plus out-of-plane vertical field superconducting magnetic measurements
- Multiple radiation shields for best low-temperature performance
- Minimize sample condensation during cool-down
- True 90° probing
- Customizable for Hall measurements
- Customizable up to 3 T with specialized probes
- Standard probing plus in-plane horizontal field electromagnetic measurements
- Generate full field without cryogen or cooldown
- Probes configured at 30° angles to accommodate electromagnet
- Largest wafer sample size: 4 in
- Sample translation for rapid probing
- Customizable to accept 6 in wafers
- Cryogen-free operation
- Push-button operation and allows unsupervised cooldown
- Affordability
- Cryogen-free operation
- Allows unsupervised cooldown
- Low-temperature operation
- Minimize sample condensation during cooldown
- Customizable to accommodate a 102 mm (4 in) wafer
- Cryogen-free operation
- Allows unsupervised cooldown
- Standard probing plus out-of-plane vertical field superconducting magnetic measurements
- True 90° probing
- Customizable up to 3 T with specialized probes
- Customizable to make Hall measurements
Easily add Hall measurement capabilities to your probe station
- A complete solution for enabling Hall measurements in a CRX-VF probe station
- Supports a range of DC Hall measurements on wafer-scale materials and structures as a function of temperature and field
- Includes all the instrumentation and software for facilitating Hall measurements
- Supports DC fields to 2 T and resistances from 0.5 mΩ to 100 GΩ
- Intuitive software provides easy system operation, data acquisition, and analysis
- Supports exporting of data for multi-carrier analysis
- Cryogen-free operation
- Allows unsupervised cooldown
- Standard probing plus in-plane horizontal field electromagnetic measurements
- Generate full field without cooldown
- Probes configured at 30° angles to accommodate electromagnet
- Optional 360° rotation
Available custom probe stations
- Cryogen-free superconducting magnet probe station
- Large (8 in) wafer probing
- High voltage measurements up to 3 kV
- Room temperature vacuum probe station
- Miniature, transportable sample vacuum chamber
Probe station features by model
Lake Shore’s probe station family features many configuration options to cover the requirements of a broad range of applications. Use the table below to identify any specific features needed and the probe station models that best meet these needs.
Looking for other Lake Shore solutions? See our cryogenic temperature sensor, cryogenic temperature controller, and cryogenic temperature monitor pages.
What is a cryogenic probe station?
A cryogenic probe station enables non-destructive testing of materials or devices in a cryogen-refrigerated vacuum chamber, with electrically conducting probes used on wafer samples to measure material phenomena as a function of temperature (as well as magnetic field on some models).