Ultra-high vacuum (UHV) micromanipulated probe stations

Standard configuration

Lake Shore offers a complete range of probe stations suitable for making electrical measurements in a UHV environment. Several standard designs are available, and systems can be custom-configured to meet a wide variety of user requirements. Lake Shore has been manufacturing UHV-compatible systems for decades, and we apply this extensive experience to the design of every UHV probe station. Typical UHV probe stations include:

All stainless steel vacuum chamber with metal sealed flanges (CF)
UHV-rated electrical feedthroughs and electrical probes
UHV-rated optical viewport
Fully bakeable to 120 °C
Room temperature or cryogenic configurations
Sample size 25 mm to 50 mm diameter
2 to 8 integrated x-y-z probe manipulators, with electrical probes installed
Temperature range from 5 K to 675 K available
Monoscope, camera, and monitor for viewing samples and probes

Probe station options include:

Larger diameter vacuum chamber and sample mount
Load lock option for sample exchange without opening the chamber
Integrated UHV turbopump for maximum pumping speed and lowest base pressure
Vibration isolated stand
Special miniature vacuum chamber to transfer sample under vacuum from glove box to probe station

Probe station datasheet

Download the Probe Station Datasheet (2249 KB).

Request a quote for a probe station

Customer papers

Interested in seeing what other customers have accomplished with their probe stations? See a list of some of their research papers. View a presentation on probe stations with a selection of applications and reference papers from a few of our probe station customers.

Model UHV-ST-400 specifications

Operating temperature	5 K to 700 K
Sample size	25 mm to 50 mm diameter (100 mm optional)
Vibration level	<1 µm
Probe coverage	14 mm to 50 mm diameter (100 mm optional)