Accessories — miniature transportation sample vacuum chamber for micromanipulated probe stations

Lake Shore offers a patent-pending, miniature, transportable sample vacuum chamber capable of maintaining a sample in vacuum during transportation via an atmosphere environment. The vacuum chamber can be used for transferring wafer/substrates under vacuum from a glove box with a special environment into a vacuum or cryogenic micromanipulated probe station (or into a vacuum chamber) and back into the glove box after testing, measurements, or preparations. This transportable vacuum chamber protects the wafer/substrates from atmospheric contamination both on loading and unloading.

Unlike a common vacuum load lock the vacuum chamber has the following features and benefits:

• Typical sizes of 50 mm diameter and 25 mm thickness
• No gate valves required
• Very convenient and easy to operate
• Low cost
• Mounting of the transportable sample mount without increasing base temperature of the cryogenic probe station

Visit our probe station overview webpage. Please contact sales@lakeshore.com for more information.