The Model CPX is a versatile cryogenic micromanipulated probe station used for non-destructive testing of devices on full and partial wafers up to 51 mm (2 in) in diameter. The CPX is a platform for measurement of electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a CPX. A wide selection of probes, cables, sample holders, and options makes it possible to configure the CPX to meet your specific measurement applications.

The CPX operates over a temperature range of 4.2 K to 475 K. With options, the base temperature can be extended down to 1.5 K. An optional interchangable high temperature sample stage provides a temperature range of 20 K to 675 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either helium or nitrogen. Vapor-cooled shielding optimizes efficiency and intercepts blackbody radiation before it reaches the sample. A control heater on the sample stage along with the radiation shield heaters provide the probe station with fast thermal response.

The CPX is user configured with up to six ultra-stable micro-manipulated probe arms. Each arm provides precise 3-axis control of the probe position to accurately land the probe tip on device features. The sample stage provides in-plane rotation to allow alignment of patterns with stage axes. Proprietary probe tips in a variety of sizes and materials minimize thermal mass and optimize electrical contacts to the device under test (DUT). Probe tips are thermally linked to the sample stage to minimize heat transfer to the DUT.

For increased versatility, CPX options include a 1.5 K base temperature stage, a 675 K high temperature stage, high vacuum, load-lock assembly, vibration isolation systems, LN₂ Dewar kit, higher magnification microscope, vacuum turbo pumping system, and fiber optic probe arm modification.