• Download the Lake Shore Model CRX-VF probe station datasheet 

The Model CRX-VF is a versatile cryogen-free micro manipulated probe station used for non-destructive testing of devices on full and partial wafers up to 51 mm (2 in) in diameter. The CRX-VF is a platform for measurement of electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, semiconductors, and spintronic devices are typical materials measured in a CRX-VF. A wide selection of probes, cables, sample holders, and options makes it possible to configure the CRX-VF to meet your specific measurement applications.

Using a single Sumitomo 4 K base temperature CCR, the CRX-VF is equipped with a vertical field superconducting magnet capable of a maximum 22.5 KOe (2.25 T)*. It provides efficient temperature operation and control over a temperature range of 10 K to 500 K without the operating expense of liquid cryogens. Each cryogenic stage is equipped with a sensor and heater to provide fast thermal response and rapid warm up for sample exchange. Actively cooled shielding intercepts blackbody radiation before it reaches the sample, ensuring small thermal gradients.

Careful design consideration was taken to provide a low vibration, user-friendly tool. Integrated vibration isolation and damping prevents mechanical vibration from affecting measurement performance. Sample stage vibration is limited to less than 1 µm (X, Y, and Z axes) through the full-scale temperature range.

The CRX-VF is user configured with up to six ultra-stable micro-manipulated probe arms, each providing precise 3 axis probe position control to land the probe tip accurately on device features. Each probe can also be rotated ±5° about its axis (planarized) to ensure multi-tip probes are properly aligned with the sample. DC measurements can be optimized for low-noise, high-impedance (low leakage), or high-thermal contact to the device under test (DUT). RF measurements include configurations up to 67 GHz. Optical sources can be introduced through viewport windows or optional fiber optic probe arm modification. Proprietary probe arms in a variety of sizes and materials minimize thermal mass and optimize electrical contact to the DUT. In addition, probe tips are thermally linked to the radiation shielding to minimize heat transfer to the DUT.

*Maximum field dependent on sample temperature—see specifications