• Download the Lake Shore Model CRX-EM-HF probe station datasheet 

The Model CRX-EM-HF is a versatile cryogen-free electromagnet-based micro manipulated probe station used for non-destructive testing of devices on full and partial wafers up to 25 mm (1 in) in diameter. The CRX-EM-HF is a platform for measurement of electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a CRX-EM-HF. A wide selection of probes, cables, sample holders, and options makes it possible to configure the CRX-EM-HF to meet your specific measurement applications.

Based on a Sumitomo 4 K base temperature CCR, the CRX-EM-HF is equipped with a 6.0 kOe (0.6 T) horizontal (in-plane) field electromagnet. It provides efficient temperature operation and control over a temperature range of 8 K to 400 K without the operating expense of liquid cryogens. An optional interchangeable high temperature sample stage provides a temperature range of 20 K to 500 K. Each cryogenic stage is equipped with a sensor and heater to provide fast thermal response and rapid warm up for sample exchange. Actively cooled shielding intercepts blackbody radiation before it reaches the sample, ensuring small thermal gradients.

Careful design consideration was taken to provide a low vibration, user-friendly tool. Integrated vibration isolation and damping prevents mechanical vibration from affecting measurement performance. Sample stage vibration is limited to less than 1 µm (X, Y, and Z axes) through the full-scale temperature range.

The CRX-EM-HF is user configured with up to four ultra-stable micro-manipulated stages, each providing precise 3-axis control of the probe position to accurately land the probe tip on device features. Each probe can also be rotated ±5° about its axis (planarized) to ensure multi-tip probes are properly aligned with the sample. The 360° sample stage rotation option allows you to measure angular-dependent and anisotropic magneto-transport properties of the DUT. Proprietary probe tips in a variety of sizes and materials minimize thermal mass and optimize electrical contacts to the DUT. Probe tips are thermally linked to the sample stage to minimize heat transfer to the DUT.