CCR (Cryogen-free) Series

Superconducting cryogen-free probe station
  • Less than 1 µm vibration
  • Temperature range (with 4 probe arms installed) from 4.5 K to 350 K (optional: 6.5 K to 475 K or 6.5 K to 675 K)
  • Accommodates up to 2 in (51 mm) diameter wafers (optional: up to 8 in [200 mm]) (see specifications chart for more details)
  • Up to eight cooled, easily interchangeable, micro-manipulated probe arms
  • Electrical measurements from DC to 67 GHz
  • Wide variety of inexpensive LF probe tips that are easy to replace
  • Very low triaxial probe arms leakage current (typically 1 to 2 fA at 1 V)
  • Non-contact, non-destructive Kelvin probes
  • Multi-tip probes
  • Fiber probe arms with single and multi-mode fiber options
  • Additional electrical feedthroughs with cables and wires to sample area
  • Optional special miniature vacuum chamber to transfer sample under vacuum from glove box to probe station 
  • Precise translation x-y-z travel stages for all monoscope system assemblies
  • Optional movable sample holder
  • System customization options
Janis — a Lake Shore Company
Janis cryogen-free series probe stations provide the researcher with vacuum and cryogenic probing capabilities without requiring the use of liquid cryogens. 4 K, 10 K, and 80 K cryocoolers use proven Gifford-McMahon (G-M) technology for reliable and affordable sample cooling. Typical applications include MEMS, nanoscale electronics, superconductivity, ferroelectrics, material sciences, and optics.