Model VFTTP4 Cryogenic Probe Station

• 25 k0e (2.5 T) vertical field superconducting magnet
• High stability operation from 2 K to 400 K
• Active cryogenic control of the cold head, magnet stage, and radiation shield
• Reduces potential for sample condensation by allowing sample to remain at room temperature while the system cools to 2 K
• Measurements from DC to 67 GHz
• Accommodates up to 51 mm (2 in) diameter wafers
• Configurable with up to four micro-manipulated probe arms
• Probe arms with 3-axis adjustments and ±5° theta planarization
• High resolution optical system
• Non-magnetic vibration isolation table

Mounted on a non-magnetic vibration isolation table,
the VFTTP4 cryogenic probe station is equipped with a 25 k0e (2.5 T) vertical field superconducting magnet. The VFTTP4 operates over a temperature range of 4.2 K to 400 K. With
options, the base temperature can be extended down to 2 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either helium or nitrogen. Vapor-cooled shielding optimizes efficiency and intercepts blackbody radiation before it reaches the sample. A wire wound control heater on the cold head minimizes temperature gradients across the sample and, along with the magnet stage and radiation shield heaters, provides the probe station with fast thermal response.

The VFTTP4 is user-configured with up to four ultrastable micro-manipulated stages, each providing precise 3-axis control of the probe position to accurately land the probe tip on device features. Proprietary probe tips in a variety of sizes and materials minimize thermal mass and optimize electrical contacts to the device under test.

For increased versatility, VFTTP4 options include a 2 K base temperature stage, LN₂ Dewar kit, higher magnification monoscopes, vacuum turbo pumping system, and fiber optic probe arm modification.