| Open cycle sample stage refrigerator |
1.5 K to 475 K |
| 1.5 K cold head stage temperature sensor |
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| 1.5 K cold head stage heater |
25 W (2 parallel heaters, 12.5 W each) |
| 1.5 K cold head stage rotary pump with oil eliminator and hose |
14.7 CFM at 60 Hz |
| 4.2 K mid-stage temperature sensor |
Lake Shore Model DT-670C-CU silicon diode |
| 4.2 K mid-stage heater |
50 W |
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| Cooled radiation shield and cooled IR-absorbing window above the sample |
| Temperature sensor |
Lake Shore Model DT-670C-CU silicon diode |
| Radiation shield heater |
100 W |
| Removable top lid with viewport |
Ø51 mm (2 in) window |
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| Temprature controller |
2 Lake Shore Model 332S and one Model 142 200 W (2-channels, 100 W each) power supply (independent regulation of 1.5 K cold head stage, 4.2 K mid-stage, radiation shield, and probe arm temperature monitoring) |
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Vacuum chamber
Diameter |
15.2 cm (6 in) |
| Removable top lid with clear fused quartz viewport |
Ø54 mm (2.1 in) window |
| Probe ports |
4 equally spaced surround the sample thermal radiation shield |
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| Machined aluminum base plate |
45.7 cm2 (18 in2) with four 19.1 cm (7.5 in) legs |
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| Four XYZ precision micro-manipulated probing stages |
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| Probe arms, thermal radiation shields, stainless steel welded bellows, and feedthrough ports |
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| Thermally linked probe mounts |
Probe mounts and radiation shield are thermally anchored to the mid-stage; one probe mount includes a platinum temperature sensor installed and wired to a 6-pin feedthrough |
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| Grounded sample holder |
SH-1.00-G, accomodates up to a Ø25 mm (1 in) sample with a Ø25 mm (1 in) probe area |
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Optics
Zoom 70 monoscope |
7:1 zoom with 5 µm resolution |
| Color CCD camera |
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| Swing arm |
Optics can be manipulated to view any part of the sample or wafer, and can be retracted and swung away to allow access to the top of the vacuum chamber for sample exchange |
| Video monitor |
High resolution, 17-inch |
| Sample illumination |
Coaxial via fiber optic or ring light from an adjustable light source and
power supply (must specify sample illumination at time of order) NOTE: Coaxial illumination is recommended for highly reflective materials |
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| High efficiency helium transfer line with foot valve for precise flow regulation |
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| Basic tools, spares, and cleaning kit |
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