Home > Lake Shore Products > Cryogenic Probe Stations > Model FWPX Cryogenic Probe Station Tech Specs

Model FWPX

4-Inch Wafer Cryogenic Probe Station

Specifications

Temperature

Operating temperature range—overall	4.5 K to 475 K*
ZN50 DC/RF probe with low RF cryogenic coaxial cable	4.5 K to 475 K*
ZN50 DC/RF probe with high RF semirigid coaxial cable	4.5 K to 400 K*
GSG microwave probe with semirigid coaxial cable	4.5 K to 350 K*

Temperature control (heaters) Sample stage	100 W (2 parallel heaters, 50 W each)
Radiation shield	100 W
Probe arm	Measurement only
*Selectable equipment

Probe Arm and Sample Stage Adjustments

Probe arm travel
X axis	127 mm (5 in)
Y axis	51 mm (2 in)
Z axis	18 mm (0.7 in)

Translation scale
X axis	20 µm
Y and Z axes	10 µm
Theta planarization*	±5°

Sample stage (sample holder)
In-plane rotation	±5°
In-plane translation	Yes
*Included with microwave probes

Frequency Range

ZN50 DC/RF probe frequency range Tungsten with cryogenic coaxial cable	0 to 50 MHz*
Tungsten with semirigid coaxial cable	0 to 1 GHz*†
Paliney 7 with cryogenic coaxial cable	0 to 50 MHz*
Paliney 7 with semirigid coaxial cable	0 to 1 GHz*†
BeCu with cryogenic coaxial cable	0 to 50 MHz*
BeCu with semirigid coaxial cable	0 to 1 GHz*†

GSG microwave probe frequency range Low frequency with K connector	0 to 40 GHz*
Mid frequency with 2.4 mm connector	0 to 50 GHz*
High frequency with 1.85 mm connector	0 to 67 GHz*
Click here for probe & cable features
* Selectable equipment † S21 > -10 dB up to 1 GHz, except for a (-40 dB) spike between 400 MHz and 800 MHz depending on probe model and placement; S11 < -3 dB up to 1 GHz

Optical

Optical viewport—located on top lids	Ø91 mm (3.6 in) outer window and Ø152 mm (6 in) inner window
Outer, clear fused quartz	99% IR transmittance
Inner	IR absorbing with narrow band visible light transmittance

Optical resolution—microscope
7:1 zoom	8 μm
16:1 zoom	8 μm*

* Selectable equipment

Sample Holder (Chuck)

Maximum sample size—overall	Up to Ø102 mm (4 in)
SH-4.00-4G, grounded chuck	Up to Ø102 mm (4 in) and 475 K
SH-4.00-4C, coaxial chuck	Up to Ø102 mm (4 in) and 400 K*
SH-4.00-4T, triaxial chuck	Up to Ø102 mm (4 in) and 400 K*
*Selectable equipment
Click here to select a sample chuck (holder)

Standard Equipment

Flow cryostat	4.5 K to 475 K
Sample stage temperature sensor	Lake Shore Model DT-670-SD-1.4H calibrated silicon diode
Sample stage heater	100 W (2 parallel heaters, 50 W each)

Cooled radiation shield and cooled IR-absorbing window above the sample
Temperature sensor	Lake Shore Model DT-670C-CU silicon diode
Radiation shield heater	100 W
Removable top lid with viewport	Ø152 mm (6 in) window

Temperature controller

Lake Shore Model 340 with 3462 expansion card and Model 142 200 W (two channels, 100 W each) power supply (independent regulation of sample stage and radiation shield, and probe arm temperature monitoring)

Electroless nickel-plated aluminum vacuum chamber
Diameter	254 mm (10 in)
Removable top lid with clear fused quartz viewport	Ø91 mm (3.6 in) window
Probe ports	6 surround the sample thermal radiation shield
Pump port	NW40 (pump sold separately)
Gas purge and 0.5 psi safety pop-off port	NW25
Spare port	NW25

Machined aluminum base plate

846 mm² (33.3 in²)

PS-TMC vibration isolation system	Includes pneumatically driven gimbal piston isolator, actuators, and supports; self leveling with a resonant frequency below 2 Hz; requires 40 psi nitrogen or air
Isolator natural frequency	Vertical 0.8 Hz, horizontal 1.0 Hz
Isolation efficiency at 5 Hz	Vertical 80 to 97%, horizontal 60 to 90%
Isolation efficiency at 10 Hz	Vertical 90 to 99%, horizontal 70 to 95%

Temperature sensor installed and wired to a 6-pin feedthrough (included on one probe arm)

Grounded sample holder

SH-4.00-4G, accommodates up to a Ø102 mm (4 in) sample with a Ø102 mm (4 in) probe area

Optics Zoom 70 microscope	7:1 zoom with 4 μm resolution
Color CCD camera	S-video or composite output format
Swing arm	Optics can be manipulated to view any part of the sample or wafer, and can be retracted and swung away to allow access to the top of the vacuum chamber for sample exchange
Video monitor	High resolution, 17-inch
Sample illumination	Coaxial via fiber optic or ring light from an adjustable light source and power supply (must specify sample illumination at time of order) NOTE: Coaxial illumination is recommended for highly reflective materials

High efficiency helium transfer line with foot valve for precise flow regulation

Instrument console

Basic tools and spares kit for standard operation

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