Home > Lake Shore Products > Cryogenic Probe Stations > Model FWP6 Cryogenic Probe Station Technical Specifications

Model FWP6 Cryogenic Probe Station

Specifications

Temperature

Operating temperature range—overall	4.5 K to 475 K^*
ZN50 DC/RF probe with low RF cryogenic coax cable	4.5 K to 475 K^*
ZN50 DC/RF probe with high RF semirigid coax cable	4.5 K to 400 K^*
GSG microwave probe with semirigid coax cable	4.5 K to 400 K^*

Temperature control (heaters)
Cold head	100 W (2 parallel heaters, 50 W each)
Radiation shield	100 W
Probe arm	Measurement only

^*Selectable equipment

Probe Arm and Sample Stage Adjustments

Probe arm Travel
X axis	12.7 mm (5 in)
Y axis	51 mm (2 in)
Z axis	18 mm (0.7 in)

Translation resolution
X axis	20 µm
Y and Z axes	10 µm
Theta planarization^*	±5°

Sample stage (sample holder)
In-plane rotation	±5°
In-plane translation	Yes

^*Included with microwave probes

Frequency Range

ZN50 DC/RF probe frequency range
Tungsten with cryogenic coax cable	0 to 50 MHz^*
Tungsten with semirigid coax cable	0 to 1 GHz^*†
Paliney 7 with cryogenic coax cable	0 to 50 MHz^*
Paliney 7 with semirigid coax cable	0 to 1 GHz^*†
BeCu with cryogenic coax cable	0 to 50 MHz^*
BeCu with semirigid coax cable	0 to 1 GHz^*†

GSG microwave probe frequency range
Low frequency with K connector	0 to 40 GHz^*
Mid frequency with 2.4 mm connector	0 to 50 GHz^*
High frequency with 1.8 mm connector	0 to 67 GHz^*
Click here for probe & cable features

^*Selectable equipment
^†S21 > -10 dB up to 1 Ghz, except for a (-40 dB) spike between 400 MHz and 800 MHz depending on probe model and placement; S11 < -3 dB up to 1 GHz

Optical

Optical viewport—located on top lids	Ø91 mm (3.6 in) outer window and Ø152 mm (6 in) inner window
Outer, clear fused quartz	99% IR transmittance
Inner	IR absorbing with narrow band visible light transmittance

Optical resolution—monoscope
7:1 zoom	5 µm
12.5:1 zoom	4 µm^*
16:1 zoom	3 µm^*

^*Selectable equipment

Sample Holder (Chuck)

Maximum sample size—overall	Up to Ø10.2 cm (4 in)
SH-4.00-4G, Grounded chuck	Up to Ø10.2 cm (4 in) and 475 K
SH-4.00-4C, Coaxial chuck	Up to Ø10.2 cm (4 in) and 400 K^*
SH-4.00-4T, Triaxial chuck	Up to Ø10.2 cm (4 in) and 400 K^*
Click here to select a sample chuck (holder)

^*Selectable equipment

Standard Equipment

Open cycle sample stage refrigerator	4.5 K to 475 K
Cold head stage temperature sensor	Lake Shore Model DT-670-SD-1.4H calibrated silicon diode
Cold head stage heater	100 W (2 parallel heaters, 50 W each)

Cooled radiation shield and cooled IR-absorbing window above the sample
Temperature sensor	Lake Shore Model DT-670C-CU silicon diode
Radiation shield heater	100 W
Removable top lid with viewport	Ø152 mm (6 in) window

Temprature controller	Lake Shore Model 340 with 3462 expansion card and one Model 142 200 W (2-channels, 100 W each) power supply (independent regulation of cold head stage, radiation shield, and probe arm temperature monitoring)

Vacuum chamber Diameter	25.4 cm (10 in)
Removable top lid with clear fused quartz viewport	Ø91 mm (3.6 in) window
Probe ports	6 surround the sample thermal radiation shield; each port is shielded by a super-insulating curtain to minimize direct 300 K blackbody radiation

Machined aluminum base plate	84.6 cm²(33.3 in²)

PS-TMC vibration isolation system	Includes pneumatically driven gimbal piston isolator, actuators, and supports; self leveling with a resonant frequency below 2 Hz; requires 80 psi nitrogen or air
Isolator natural frequency	Vertical 0.8 Hz, horizontal 1.0 Hz
Isolator efficiency at 5 Hz	Vertical 80 to 97%, horizontal 60 to 90%
Isolator efficiency at 10 Hz	Vertical 90 to 99%, horizontal 70 to 95%

Six XYZ precision micro-manipulated probing stages

Probe arms, thermal radiation shields, stainless steel welded bellows, and feedthrough ports

Thermally linked probe mounts	Probe mounts and radiation shield are thermally anchored to the cold head; one probe mount includes a platinum temperature sensor installed and wired to a 6-pin feedthrough

Grounded sample holder	SH-4.00-4G, accomodates up to a Ø10.2 cm (4 in) sample with a Ø50.8 mm (2 in) probe area

Optics Zoom 70 monoscope	7:1 zoom with 5 µm resolution
Color CCD camera
Swing arm	Optics can be manipulated to view any part of the sample or wafer, and can be retracted and swung away to allow access to the top of the vacuum chamber for sample exchange
Video monitor	High resolution, 17-inch
Sample illumination	Coaxial via fiber optic or ring light from an adjustable light source and power supply (must specify sample illumination at time of order) NOTE: Coaxial illumination is recommended for highly reflective materials

High efficiency helium transfer line with foot valve for precise flow regulation

Basic tools, spares, and cleaning kit

Home | Products | Ordering/Pricing | Search | Site Map