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| Model FWP6 Cryogenic Probe Station Features |
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- High stability operation from 4.5 K to 475 K
- Active cryogenic control of the cold head and radiation shield
- Measurements from DC to 67 GHz
- Accommodates up to 10.2 cm (4 in) diameter wafers
- Configurable with up to six micro-manipulated probe arms
- Probe arms with 3-axis adjustments and ±5° theta planarization
- Sample stage with in-plane translation and ±5° in-plane rotation
- Integrated vibration isolation system
- High resolution optical system
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| Product Description |
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The Model FWP6 is a versatile cryogenic micro-manipulated probe station used for nondestructive testing of devices on full and partial wafers up to 10.2 cm (4 in) in diameter. The FWP6 is a platform for measurement of electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a FWP6. A wide selection of probes, cables, sample holders, and options makes it possible to configure the FWP6 to meet your specific measurement applications.
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The FWP6 cryogenic probe station operates over a temp-erature range of 4.5 K to 475 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either helium or nitrogen. Vapor-cooled shielding optimizes efficiency and intercepts blackbody radiation before it reaches the sample. Two control heaters on the cold head minimize temperature gradients across the sample and, along with the radiation shield heater, provide the probe station with fast thermal response.
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The FWP6 is user-configured with up to six ultrastable micro-manipulated stages, each providing precise 3-axis control of the probe position to accurately land the probe tip on device features. The sample stage provides in-plane translation and rotation to allow alignment of patterns with stage axes. Proprietary probe tips in a variety of sizes and materials minimize thermal mass and optimize electrical contacts to the device under test (DUT). Probe tips are thermally linked to the cold head to minimize heat transfer to the DUT.
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For increased versatility, FWP6 options include
LN2 Dewar kit, higher magnification monoscopes, vacuum turbo pumping system, and fiber optic probe arm modification.
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 Custom configure a FWP6 Cryogenic Probe Station |
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