Home > Lake Shore Products > Cryogenic Probe Stations > Model EMTTP4 Cryogenic Probe Station Tech Specs

Model EMTTP4 Cryogenic Probe Station

Specifications

Magnetic Field

Maximum field

5.5 k0e (0.55 T)*

Field uniformity (at 70 A)
1 cm diameter wafer	0.6%
1.27 cm diameter wafer	1.1%
2 cm diameter wafer	2%
2.54 cm diameter wafer	2.6%

Field control stability

<50 mG RMS**

*Hall probe is calibrated to read field at the center of the magnet gap
**With settle band of 100 mG

Temperature

Operating temperature range—overall	5 K to 475 K**
ZI50 DC/RF probe with low RF cryogenic coax cable	5 K to 475 K**
ZI50 DC/RF probe with high RF semirigid coax cable	5 K to 400 K**
GSG microwave probe with semirigid coax cable	5 K to 400 K**

Temperature control (heaters)
Cold head stage	100 W
Two radiation shields	100 W each
Probe arm	Measurement only

Temperature control stability
With LHe	5 K to 50 K	<5 mK RMS
With LHe	50 K and higher	<50 mK RMS
With LN2	80 K and higher	<100 mK RMS

*Limited from 10 K to 400 K when configured with the PS=EMTTP4-360 360° sample stage rotation option
**Selectable equipment

Probe Arm Adjustments

Travel
X axis	51 mm (2 in)
Y axis	25 mm (1 in)
Z axis	18 mm (0.7 in)

Translation resolution
X axis	20 µm
Y and Z axes	10 µm
Theta planarization*	±5°

Sample stage (sample holder)
Rotation**	360°

*Included with microwave probes
**Optional — recommended when taking measurements using microwave probes

Frequency Range

ZI50 DC/RF probe frequency range Tungsten with cryogenic coax cable	0 to 50 MHz^*
Tungsten with semirigid coax cable	0 to 1 GHz^†
Paliney 7 with cryogenic coax cable	0 to 50 MHz^*
Paliney 7 with semirigid coax cable	0 to 1 GHz^*†
BeCu with cryogenic coax cable	0 to 50 MHz^*
BeCu with semirigid coax cable	0 to 1 GHz^*†

GSG microwave probe frequency range Low frequency with K connector	0 to 40 GHz^*
Mid frequency with 2.4 mm connector	0 to 50 GHz^*
High frequency with 1.8 mm connector	0 to 67 GHz^*
Click here for probe & cable features

^*Selectable equipment
^†S21 > -10 dB up to 1 Ghz, except for a (-40 dB) spike between 400 MHz and 800 MHz depending on probe model and placement; S11 < -3 dB up to 1 GHz

Optical

Optical viewport—located on top lids	Ø54 mm (2.1 in) outer window and Ø51 mm (2 in) inner window
Outer, clear fused quartz	99% IR transmittance
Inner	IR absorbing with narrow band visible light transmittance

Optical resolution—monoscope
7:1 zoom	5 µm
12.5:1 zoom	4 µm^*
16:1 zoom	3 µm^*

^*Selectable equipment

Sample Holder (Chuck)

Maximum sample size—overall	Up to Ø25 mm (1 in)
SH-1.00-G, grounded chuck	Up to Ø25 mm (1 in) and 475 K
SH-1.00-I, isolated chuck	Up to Ø25 mm (1 in) and 400 K^*
SH-1.00-C, coaxial chuck^^	Up to Ø25 mm (1 in) and 400 K^*
SH-1.00-T, triaxial chuck^^	Up to Ø25 mm (1 in) and 400 K^*
Click here to select a sample chuck (holder)

^*Selectable equipment
^**Not available in combination with the 360° sample stage rotation feature

Standard Equipment

Electromagnet	5.5 k0e (0.55 T), horizontal field
Water flow rate	7.6 L/min (2 gal/min)

Electromagnet power supply	Lake Shore Model 642 Electromagnet Power Supply
Output type	Bipolar, linear, 4-quadrant, DC current source
Current	±70 A
Voltage	±35 V
Water flow rate	5.7 L/min (1.5 gal/min)

Gaussmeter and Hall Probe	Lake Shore Model 475 with probe (control and monitor field)

Open cycle sample stage refrigerator	5 K to 475 K
Cold head stage temperature sensor	Lake Shore Model TG-120-SD-4H calibrated Cernox^TM RTD
Cold head stage heater	100 W

Cooled radiation shield and cooled IR-absorbing window above the sample
Two radiation shield temperature sensors	Lake Shore Model DT-670C-CU silicon diode
Two radiation shield heaters	100 W and 100 W
Removable top lid with viewport	Ø51 mm (2 in) window

Temprature controllers	One Lake Shore Model 340, one Model 332S, and one Model 142 200 W (2-channels, 100 W each) power supply (independent regulation of cold head stage, radiation shield, and probe arm temperature monitoring)

Vacuum chamber Outside Dimensions	34 cm × 20.3 cm (13.4 in × 8 in)
Removable top lid with clear fused quartz viewport	Ø54 mm (2.1 in) window
Probe ports	4 equally spaced surround the sample thermal radiation shield

Machined aluminum base plate	71.1 cm × 70 cm (28 in × 24 in)

PS-TMC vibration isolation table	Includes pneumatically driven gimbal piston isolator, actuators, and supports; self leveling with a resonant frequency below 2 Hz; requires 80 psi nitrogen or air
Isolator natural frequency	Vertical 0.8 Hz, horizontal 1.0 Hz
Isolator efficiency at 5 Hz	Vertical 80 to 97%, horizontal 60 to 90%
Isolator efficiency at 10 Hz	Vertical 90 to 99%, horizontal 70 to 95%

Four XYZ precision micro-manipulated probing stages

Probe arms, thermal radiation shields, stainless steel welded bellows, and feedthrough ports

Thermally linked probe mounts	Probe mounts and radiation shield are thermally anchored to the cold head; one probe mount includes a platinum temperature sensor installed and wired to a 6-pin feedthrough

Grounded sample holder	SH-1.00-G, accomodates up to a Ø25 mm (1 in) sample with a Ø25 mm (1 in) probe area

Optics Zoom 70 monoscope	7:1 zoom with 5 µm resolution
Color CCD camera
Swing arm	Optics can be manipulated to view any part of the sample or wafer, and can be retracted and swung away to allow access to the top of the vacuum chamber for sample exchange
Video monitor	High resolution, 17-inch
Sample illumination	Coaxial via fiber optic or ring light from an adjustable light source and power supply (must specify sample illumination at time of order) NOTE: Coaxial illumination is recommended for highly reflective materials

High efficiency helium transfer line with foot valve for precise flow regulation

Instrument console

Basic tools, spares, and cleaning kit

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