Home > Lake Shore Products > Cryogenic Probe Stations > Model EMPX-HF Cryogenic Probe Station Tech Specs

Model EMPX-HF

Electromagnet-Based Horizontal Field Cryogenic Probe Station

Specifications

Magnetic Field

Maximum field	5.5 kOe (0.55 T)*
Probe movement due to magnet field ramping to 5.5 kOe (0.55 T)	<5 μm

Field uniformity (at 70 A) 10 mm diameter wafer	0.6%
12.7 mm diameter wafer	1.1%
20 mm diameter wafer	2%
25.4 mm diameter wafer	2.6%

Field control stability

<50 mG RMS**

*Hall probe is calibrated to read field at the center of the magnet gap
**With settle band of 100 mG

Temperature

Sample temperature range—standard*	4.5 K to 400 K
Sample temperature range—optional*	3.2 K to 400 K**

Temperature control (heaters) Sample stage	100 W
Radiation shields	Two, 100 W each
Probe arm	Measurement only

Temperature control stability
With LHe	5.5 K to 50 K	<5 mK RMS
With LHe	50 K and higher	<50 mK RMS
With LNc	80 K and higher	<100 mK RMS

*Limited from 8 K to 400 K when configured with the PS-360-EMPX 360° sample stage rotation option
** Selectable equipment

Probe Arm Adjustments

Travel
X axis	51 mm (2 in)
Y axis	25 mm (1 in)
Z axis	18 mm (0.7 in)

Translation scale
X axis	20 µm
Y and Z axes	10 µm
Theta planarization*	±5°

Sample stage (sample holder)
In-plane rotation	360°

*Included with microwave probes
**Optional — recommended when taking measurements using microwave probes

Frequency Range

ZN50 DC/RF probe frequency range Tungsten with cryogenic coaxial cable	0 to 50 MHz*
Tungsten with semirigid coaxial cable	0 to 1 GHz*†
Paliney 7 with cryogenic coaxial cable	0 to 50 MHz*
Paliney 7 with semirigid coaxial cable	0 to 1 GHz*†
BeCu with cryogenic coaxial cable	0 to 50 MHz*
BeCu with semirigid coaxial cable	0 to 1 GHz*†

GSG microwave probe frequency range Low frequency with K connector	0 to 40 GHz*
Mid frequency with 2.4 mm connector	0 to 50 GHz*
High frequency with 1.85 mm connector	0 to 67 GHz*
Click here for probe & cable features

* Selectable equipment
† S21 > -10 dB up to 1 GHz, except for a (-40 dB) spike between 400 MHz and 800 MHz depending on probe model and placement; S11 < -3 dB up to 1 GHz

Optical

Optical viewport—located on top lids	Ø54 mm (2.13 in) outer window and Ø50 mm (2 in) inner window
Outer, clear fused quartz	99% IR transmittance
Inner	IR absorbing with narrow band visible light transmittance

Optical resolution—microscope
7:1 zoom	8 μm
16:1 zoom	8 μm*

* Selectable equipment

Sample Holder (Chuck)

Maximum sample size—overall	Up to Ø25 mm (1 in)
SH-1.00-G-EM, grounded chuck	Up to Ø25 mm (1 in) and 400 K
SH-1.00-I-EM, isolated chuck	Up to Ø25 mm (1 in) and 400 K*
SH-1.00-C-EM, coaxial chuck**	Up to Ø25 mm (1 in) and 400 K*
SH-1.00-T-EM, triaxial chuck**	Up to Ø25 mm (1 in) and 400 K*
Selectable equipment *Not available in combination with the 360° sample stage rotation feature
Click here to select a sample chuck (holder)

Standard Equipment

Electromagnet	5.5 kOe (0.55 T), horizontal field
Water flow rate	7.6 L/min (2 gal/min)

Electromagnet power supply	Lake Shore Model 642 electromagnet power supply
Output type	Bipolar, linear, 4-quadrant, DC current source
Current	±70 A
Voltage	±35 V
Water flow rate	5.7 L/min (1.5 gal/min)

Gaussmeter and Hall probe

Lake Shore Model 475 DSP gaussmeter with probe (control and monitor field)

Flow cryostat	4.5 K to 400 K
Sample stage temperature sensor	Lake Shore Model CX-1050-SD-HT-1.4M calibrated Cernox™ RTD
Sample stage heater	100 W

Cooled radiation shield and cooled IR-absorbing window above the sample
Radiation shield temperature sensors	Two Lake Shore Model DT-670C-CU silicon diodes
Radiation shield heaters	100 W and 100 W
Removable top lid with viewport	Ø50 mm (2 in) window

Temperature controllers

One Lake Shore Model 336 temperature controller and one Lake Shore Model 142 200 W (two channels, 100 W each) power supply (independent regulation of sample stage and radiation shield, and probe arm temperature monitoring)

Electroless nickel-plated aluminum vacuum chamber
Outside dimensions	340 mm × 203 mm (13.4 in × 8 in)
Removable top lid with clear fused quartz viewport	Ø54 mm (2.13 in) window
Probe ports	4 surround the sample thermal radiation shield
Pump port	NW 40 (pump sold separately)
Gas purge and 0.5 psi safety pop-off port	NW 25

Machined aluminum base plate

711 mm x 700 mm (28 in x 27.6 in)

PS-TMC vibration isolation system	Includes pneumatically driven gimbal piston isolator, actuators, and supports; self leveling with a resonant frequency below 2 Hz; requires 40 psi nitrogen or air
Isolator natural frequency	Vertical 0.8 Hz, horizontal 1.0 Hz
Isolation efficiency at 5 Hz	Vertical 80 to 97%, horizontal 60 to 90%
Isolation efficiency at 10 Hz	Vertical 90 to 99%, horizontal 70 to 95%

Temperature sensor installed and wired to a 6-pin feedthrough (included on one probe arm)

Grounded sample holder

SH-1.00-G-EM, accommodates up to a Ø25 mm (1 in) sample with a Ø25 mm (1 in) probe area

Optics Zoom 70 microscope	7:1 zoom with 8 μm resolution
Color CCD camera	S-video or composite output format
Swing arm	Optics can be manipulated to view any part of the sample or wafer, and can be retracted and swung away to allow access to the top of the vacuum chamber for sample exchange
Video monitor	High resolution, 17-inch
Sample illumination	Coaxial via fiber optic or ring light from an adjustable light source and power supply (must specify sample illumination at time of order) NOTE: Coaxial illumination is recommended for highly reflective materials

High efficiency helium transfer line with foot valve for precise flow regulation

Instrument console

Basic tools and spares kit for standard operation

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