| Specifications |
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| Temperature |
| Operating temperature range—overall |
Standard: Base 4.5 K; control range 5 K to 350 K |
Optional: Base 4.5 K; control range 5 K to 475 K** |
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2 arms |
4 arms |
6 arms |
| ZN50 DC/RF probe with low RF cryogenic coaxial cable |
4.5 K; 5 K to 475 K** |
5.5 K; 6 K to 475 K** |
6 K; 6.5 K to 475 K** |
| ZN50 DC/RF probe with high RF semirigid coaxial cable |
4.5 K; 5 K to 400 K** |
5.5 K; 6 K to 400 K** |
6 K; 6.5 K to 400 K** |
| GSG microwave probe with semirigid coaxial cable |
4.5 K; 5 K to 350 K |
5.5 K; 6 K to 350 K |
6 K; 6.5 K to 350 K |
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Typical cool down time***
Room temperature to within 10 K of base |
1.5 h |
* Typical temperature performance at 60 Hz,
208 VAC, 25 °C cooling water
** Selectable equipment; high temperature coaxial sample
holder limits low end temperature to 50 K (base), 55 K (control) |
| Room temperature to within 1 K of base |
2 h |
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Warm up time
From base to room temperature |
1 h |
*** 50 Hz operation increases cool down time by 25% |
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Control stability
<10 K |
50 mK |
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| 11 K to 250 K |
10 mK |
| 251 K to 350 K |
20 mK |
| 351 K to 475 K** |
50 mK |
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Temperature control (heaters)
Sample stage |
100 W |
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| Sample stage |
100 W |
| Radiation shield |
100 W |
| CCR riser |
200 W (2 parallel heaters, 100 W each) |
| Probe arm |
Measurement only |
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| CCR Vibration |
Pump Down Time |
| Overall (X, Y, and Z axes) |
<1 μm peak to peak at
sample stage |
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| Before CCR start-up (10-3 torr) |
20 min |
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| Vacuum |
Probe Arm Thermal Drift |
| Volume |
8.7 L (530 in3) |
| Room temperature |
10-4 torr |
| At base temperature |
10-5 torr |
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77 K to 300 K |
Base temp to 300 K |
| X axis |
TBD |
TBD |
| Y axis |
<5 µm |
<5 µm |
| Z axis |
TBD |
TBD |
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| Probe Arms |
Sample Space |
| Travel |
| X axis |
51 mm (2 in) |
| Y axis |
25 mm (1 in) |
| Z axis |
18 mm (0.7 in) |
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| Translation scale |
| X axis |
20 µm |
| Y and Z axes |
10 µm |
| Theta planarization (included with microwave probes) |
±5° |
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| Sample area |
Up to 51 mm (2 in) |
| Probing area* |
Ø25 mm (1 in) |
| Sample thickness |
Up to 12 mm (thicker samples may
reduce probable area) |
| Working height of sample |
889 mm (35 in) from floor |
| Distance to radiation shield |
42 mm (1.65 in) from sample holder to
bottom of viewport |
| Distance from vacuum chamber |
72 mm (2.84 in) from sample holder to
top of viewport |
| * Probing possible over entire sample area; all probe tips are guaranteed to land
in Ø25 mm (1 in) |
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| CCR Compressor Requirements |
| Compressor |
CSW-71C |
CSW-71D |
| Ambient temperature |
5 °C to 28 °C;
28 °C to 35 °C with reduced capacity |
5 °C to 28 °C;
28 °C to 35 °C with reduced capacity |
| Line voltage |
200 VAC ±10% |
380/400/415 VAC |
460/480 VAC |
| Frequency |
50/60 Hz |
50 Hz |
60 Hz |
| Phase |
3-phase, delta |
3-phase, delta |
| Power |
8.3 kW max |
8.3 kW max |
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Cooling water
Temperature |
4 °C to 28 °C |
| Flow rate |
7 L/min at 28 °C to 4 L/min at 4 °C |
| Inlet pressure |
0.20 MPa (29 psig) to 0.69 MPa (100 psig) |
| Pressure drop |
0.05 MPa (7 psig) at 4 L/min to 0.32 MPa (46 psig) at 10 L/min |
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| Gas line length |
6 m (19.7 ft) standard |
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| Frequency Range |
ZN50 DC/RF probe frequency range
Tungsten with cryogenic coaxial cable |
0 to 50 MHz* |
| Tungsten with semirigid coaxial cable |
0 to 1 GHz*† |
| Paliney 7 with cryogenic coaxial cable |
0 to 50 MHz* |
| Paliney 7 with semirigid coaxial cable |
0 to 1 GHz*† |
| BeCu with cryogenic coaxial cable |
0 to 50 MHz* |
| BeCu with semirigid coaxial cable |
0 to 1 GHz*† |
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GSG microwave probe frequency range
Low frequency with K connector |
0 to 40 GHz* |
| Mid frequency with 2.4 mm connector |
0 to 50 GHz* |
| High frequency with 1.85 mm connector |
0 to 67 GHz* |
 Click here for probe & cable features |
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*Selectable equipment
†S21 > -10 dB up to 1 Ghz, except for a (-40 dB) spike between 400 MHz and 800 MHz depending on probe model and placement; S11 < -3 dB up to 1 GHz |
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| Optical |
| Optical viewport—located on top lids |
Ø54 mm (2.13 in) outer window and Ø50 mm (2 in) inner window |
| Outer, clear fused quartz |
99% IR transmittance |
| Inner |
IR absorbing with narrow band visible light transmittance |
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| Optical resolution—monoscope |
| 7:1 zoom |
4 µm |
| 16:1 zoom |
4 µm* |
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| *Selectable equipment |
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| Sample Holder (Chuck) |
| Maximum sample size—overall |
Up to Ø51 mm (2 in)* |
| SH-1.25-G, grounded chuck |
Up to Ø32 mm (1.25 in) and 350 K |
| SH-1.25-I, isolated chuck |
Up to Ø32 mm (1.25 in) and 350 K* |
| SH-1.25-C, coaxial chuck |
Up to Ø32 mm (1.25 in) and 350 K* |
| SH-1.25-T, triaxial chuck |
Up to Ø32 mm (1.25 in) and 350 K* |
| SH-2.00-G, grounded chuck |
Up to Ø51 mm (2 in) and 350 K* |
| SH-2.00-C, coaxial chuck |
Up to Ø51 mm (2 in) and 350 K* |
| SH-2.00-C-HT, coaxial chuck, high temperature |
Up to Ø51 mm (2 in) and 475 K** |
| SH-2.00-T, triaxial chuck |
Up to Ø51 mm (2 in) and 350 K* |
| Click here to select a sample chuck (holder) |
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* Selectable equipment
** Selectable equipment; high temperature coaxial sample holder limits low end temperature to 50 K (base); 55 K (control);
requires option PS-HTA (purchased separately) |
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| Standard Equipment |
| Closed cycle refrigerator — SHI RDK-408D2 |
4.5 K (base); 5 K to 475 K (control) |
| Sample stage temperature sensor |
Lake Shore Model CX-1050-CU-HT-1.4M calibrated Cernox™ RTD |
| Cold head temperature sensor |
Lake Shore Model DT-670C-CU silicon diode |
| Riser temperature sensor |
Lake Shore Model DT-670C-CU silicon diode |
| Sample stage heater |
100 W |
| Cold head heater |
100 W |
| Riser heater |
200 W (2 parallel heaters, 100 W each) |
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| Cooled radiation shield and cooled IR-absorbing window above the sample |
| Diameter |
127 mm (5 in) |
| Radiation shield temperature sensor |
Lake Shore Model DT-670C-CU silicon diode |
| Material |
Nickel-plated aluminum |
| Radiation shield heater |
100 W |
| Removable top lid with viewport |
Ø51 mm (2 in) window; Ø50 mm (1.97 in) viewing area |
| Sample access |
127 mm (5 in) |
| Typical temperature |
30 K to 35 K throughout the full-scale temperature range |
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| Temperature controllers |
Two Lake Shore Model 340s, one 3462 2-channel input card, and one Model 142 power supply (independent regulation of sample stage, sample stage, riser and radiation shield, and probe arm temperature monitoring) |
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| Electroless nickel-plated aluminum vacuum chamber |
| Diameter |
203 mm (8 in) |
| Seals |
O-ring (370 Buna-N) |
| Removable top lid with clear fused quartz viewport |
Ø64 mm (2.5 in) window |
| Viewable area |
Ø54 mm (2.13 in) |
| Probe ports |
Up to 6 surround the sample thermal radiation shield |
| Pump port |
KF-40 with valve (pump sold separately) |
| Gauge port |
KF-25 (gauge not included) |
| Gas port |
0.25 in NPT with valve (inert gas only) |
| Over pressure safety |
3.4 kPa (0.5 psi) pressure relief valve |
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| Machined nickel-plated aluminum base plate (table) |
635 mm × 508 mm (25 in × 20 in) |
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| Support stand |
Low vibration, welded steel stand with integrated passive vibration isolation and dampening—minimizes system vibration displacement |
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| Temperature sensor installed and wired to a 6-pin feedthrough (included on one probe arm) |
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| Grounded sample holder |
SH-1.25-G, accommodates up to a Ø32 mm (1.25 in) sample with a Ø25 mm
(1 in) probe area to land all probes |
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Optics
Zoom 70 microscope |
7:1 zoom with 4 μm resolution |
| Color CCD camera |
S-video or composite output format |
| Swing arm |
Optics can be manipulated to view any part of the sample or wafer, and can be
retracted and swung away to allow access to the top of the vacuum chamber for
sample exchange |
| Video monitor |
High resolution, 17-inch |
| Sample illumination |
Coaxial via fiber optic or ring light from an adjustable light source and power
supply (must specify sample illumination at time of order) NOTE: Coaxial illumination is recommended for highly reflective materials |
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| Basic tools and spares kit for standard operation |
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