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Model CRX-4K

Cryogen-Free 4 K Closed Cycle Refrigerator-Based Cryogenic Probe Station

Quantity

Part Number

Description

CRX-4K

Up to 6 micro-manipulated stage CCR-based cryogen free 2-inch wafer probe station

Configurable Options:

Probes, probe tips, and cables are user configurable options and are required

Up to Six XYZ Precision Micro-manipulated Stages

MMS-09

Micro-manipulated stage with thermal radiation shields, stainless steel welded bellows, and feedthrough ports—includes probe arm and base; probes, probe tips, and cables sold separately

ZN50-26U

50 W stripline probe body mount

ZN50 Probe Tips (Alumina Ceramic Blade) (Click here for more information on Z50 probe tips)

ZN50R-03-W

3 μm radius, tungsten, up to 1 GHz*

ZN50R-10-W

10 μm radius, tungsten, up to 1 GHz*

ZN50R-25-W

25 μm radius, tungsten, up to 1 GHz*

ZN50R-03-P7

3 μm radius, Paliney 7, up to 1 GHz*

ZN50R-10-P7

10 μm radius, Paliney 7, up to 1 GHz*

ZN50R-25-P7

25 μm radius, Paliney 7, up to 1 GHz*

ZN50R-03-BECU

3 μm radius, beryllium copper, up to 1 GHz*

ZN50R-10-BECU

10 μm radius, beryllium copper, up to 1 GHz*

ZN50R-25-BECU

25 μm radius, beryllium copper, up to 1 GHz*

ZN50R-100-BECU

100 μm radius, beryllium copper, up to 1 GHz*

ZN50R-200-BECU

200 μm radius, beryllium copper, up to 1 GHz*

* Maximum frequency is 50 MHz with ZN50C-G or ZN50C-T cable. Maximum frequency is 1GHz with MWC-09-00K cable.

ZN50 DC/RF Cables (Click here for more information on Z50 cables)

ZN50C-G

Ultra-miniature cryogenic coaxial probe cable with SMA plug at probe end, BNC feedthrough, and grounded shield (shielded measurements to 50 MHz, max cable temp 350 K, max sample temp 500 K)

ZN50C-T

Ultra-miniature cryogenic coaxial probe cable with SMA plug at probe end to 3-lug triaxial feedthrough (for low leakage guarded measurements to 50 MHz, max cable temp 350 K, max sample temp 500 K)

MWC-09-00K

Semirigid microwave coaxial probe cable with K (SMA compatible) plug at probe end and K (SMA compatible) socket at feedthrough end (for high frequency measurements to 1 GHz*, max cable temp 350 K, max sample temp 500 K)

*S21 > -10 dB up to 1 GHz, except for a (-40 dB) spike between 400 MHz and 800 MHz depending on probe model and placement; S11< -3 dB up to 1 GHz

GSG Microwave Probes (Click here for more information on GSG microwave probes)

GSG-050-40A-26U-E

K connector, 40 GHz, 50 μm pitch

GSG-100-40A-26U-E

K connector, 40 GHz, 100 μm pitch

GSG-150-40A-26U-E

K connector, 40 GHz, 150 μm pitch

GSG-200-40A-26U-E

K connector, 40 GHz, 200 μm pitch

GSG-250-40A-26U-E

K connector, 40 GHz, 250 μm pitch

GSG-050-50A-26U-E

2.4 mm connector, 50 GHz, 50 μm pitch

GSG-100-50A-26U-E

2.4 mm connector, 50 GHz, 100 μm pitch

GSG-150-50A-26U-E

2.4 mm connector, 50 GHz, 150 μm pitch

GSG-200-50A-26U-E

2.4 mm connector, 50 GHz, 200 μm pitch

GSG-250-50A-26U-E

2.4 mm connector, 50 GHz, 250 μm pitch

GSG-050-67A-26U-E

1.85 mm connector, 67 GHz, 50 μm pitch

GSG-100-67A-26U-E

1.85 mm connector, 67 GHz, 100 μm pitch

GSG-150-67A-26U-E

1.85 mm connector, 67 GHz, 150 μm pitch

GSG-200-67A-26U-E

1.85 mm connector, 67 GHz, 200 μm pitch

GSG-250-67A-26U-E

1.85 mm connector, 67 GHz, 250 μm pitch

GSG-TPM

Theta planarization module with upgraded probe manipulator to accommodate microwave probe rotation mechanism for in situ probe planarization. (Included with each GSG probe ordered with a probe station. When purchasing a GSG probe alone, GSG-TPM is not included.)

GSG Microwave Cables (Click here for more information on GSG microwave cables)

MWC-09-00K

Semirigid microwave coaxial probe cable with K (SMA compatible) plug at probe end and K (SMA compatible) socket at feedthrough end (for measurements to 40 GHz, max cable temp 350 K, max sample temp 500 K)

MWC-09-240

Semirigid microwave coaxial probe cable with a 2.4 mm plug at probe and socket feedthrough ends (for measurements to 50 GHz, max cable temp 350 K, max sample temp 500 K)

MWC-09-185

Semirigid microwave coaxial probe cable with a 1.85 mm plug at probe and socket feedthrough ends (for measurements to 67 GHz, max cable temp 350 K, max sample temp 500 K)

Sample Chucks (Holders) – Each base system includes one SH-1.25-G (grounded) sample holder
(Click here for more information on sample holders)

SH-1.25-G

Grounded sample holder for up to 32 mm (1.25 in) diameter samples (350 K)

SH-1.25-I

Isolated sample holder for up to 32 mm (1.25 in) diameter samples (350 K)

SH-1.25-C

Coaxial sample holder for up to 32 mm (1.25 in) diameter samples (350 K)*

SH-1.25-T

Triaxial sample holder for up to 32 mm (1.25 in) diameter samples (350 K)**

SH-2.00-G

Grounded sample holder for up to 51 mm (2 in) diameter samples (350 K)

SH-2.00-C

Coaxial sample holder for up to 51 mm (2 in) diameter samples (350 K)*

SH-2.00-T

Triaxial sample holder for up to 51 mm (2 in) diameter samples (350 K)**

*Coaxial sample holders require one FT-BNC or FT-TRIAX feedthrough as listed below
**Triaxial sample holders require one FT-TRIAX feedthrough as listed below

FT-BNC

Coaxial feedthrough and coaxial cable, installed and wired

FT-TRIAX

Triaxial feedthrough and coaxial cable, installed and wired

Probe Station Options:

PS-FOA

Fiber optic probe arm modification. Transmit or receive light or IR/UV radiation. Fiber optic terminated with SMA connector or compression feedthrough. (Fiber optic wire not included and priced separately based on requirements outlined in fiber optic worksheet. Fiber optic and probe cannot be used simultaneously.)

PS-HTA

High temperature sample stage for temperature operation from 20 K to 500 K. Integrated into the stage are a 51 mm (2 in) diameter coaxial sample holder, thermal standoff, calibrated PT-100 temperature sensor, heater, wiring, and cabling. The high temperature sample stage is interchangeable; standard sample holders can be used when the high temperature sample stage is removed. NOTE: reduces Z-axis travel to 12 mm; requires manual switching of 100 W radiation shield heater and sensor for closed loop control. Optional Model 336 temperature controller available for dedicated control loop.

PS-Z16

16:1 zoom monoscope upgrade; provides 4 μm resolution NOTE: consult Lake Shore for field upgrade

PS-V81DPC

Compact turbo pumping system—includes Varian V-81 turbo pump with oil free dry scroll backing pump, vacuum gauge for high vacuum, controller, and adaptors (specify 120 V/60 Hz or 220 V/50 Hz)

PS-PLVI-40

Pump-line vibration isolator—includes NW 40 fittings, 1 m stainless steel bellows, clamps, and rings (placed between pump cart and system); requires one bag of cement. NOTE: for use with PS-V81DPC

PA-SEN

Probe arm modification with temperature sensor installed and wired to a 6-pin feedthrough

PS-PAB-09

Probe arm and base

CS-5

Calibration substrate for GSG probes—pad size: 50 µm2; calibration type: SOLT (short-open-load-through), LRL (line-reflective-line), LRM (line-reflective-match); pitch range: 75 to 250 µm

CS-15

Calibration substrate for GSG probes—pad size: 25 µm2; calibration type: SOLT (short-open-load-through), LRL (line-reflective-line), LRM (line-reflective-match); pitch range: 40 to 150 µm

RC-EM10-208230-60-CE

Recirculating chiller; P-3, 208 to 230 V / 60 Hz / 3-ph / 20 A, 10000 W, 10 gpm, 32 psi; TF-10000

RC-EM10-400-50-CE

Recirculating chiller; P-2, 380 to 400 V / 50 Hz / 3-ph / 16 A, 8500 W, 3.3 gpm, 60 psi; TF-10000

Special Request:

U.S. And Canada Only Shipping

At this time, we cannot ship or bill web orders outside of the United States and Canada. We cannot accept credit cards issued from a bank outside of the U.S. or Canada. If you are outside of the U.S. or Canada and would like export prices or order information, please contact your local sales representative by visiting http://www.lakeshore.com/com/sr.html.

Sales Tax: Lake Shore currently collects sales tax in the following states: AZ, CA, FL, IN, OH, SC WA

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Please submit your customized system for quotation by clicking on the button below. You will then be prompted to check your specifications, and once approved, these will be e-mailed to our sales department for a quote.

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