Home > Lake Shore Products > Cryogenic Probe Stations > Model CRTTP6-4K Cryogenic Probe Station Technical Specifications

Model CRTTP6-4K Cryogenic Probe Station Now available

Specifications

Temperature*

Operating temperature range—overall	Base 4.5 K; control range 5 K to 475 K**
Operating temperature range—overall	2 arms	4 arms	6 arms
ZN50 DC/RF probe with low RF cryogenic coax cable	4.5 K; 5 K to 475 K**	5.25 K; 5.75 K to 475 K**	6 K; 6.5 K to 475 K**
ZN50 DC/RF probe with high RF semirigid coax cable	4.5 K; 5 K to 400 K**	5.25 K; 5.75 K to 400 K**	6 K; 6.5 K to 400 K**
GSC microwave probe with semirigid coax cable	4.5 K; 5 K to 350 K	5.25 K; 5.75 K to 350 K	6 K; 6.5 K to 350 K

Cool down time Room temperature to within 5 K of base	1.5 h	Typical temperature performance at 60 Hz, 208 VAC, 25° C cooling water * Selectable equipment; high temperature coaxial sample holder limits low end temperature to 50 K (base), 55 K (control)
Room temperature to base	2 h

Warm up time From base to room temperature	1 h

Control stability < 10 K	50 mK
11 K to 250 K	10 mK
251 K to 350 K	20 mK
351 K to 475 K**	50 mK

Temperature control (heaters) Sample stage	100 W
Cold head	100 W
Radiation shield	100 W
CCR Riser	200 W (2 parallel heaters, 100 W each)
Probe arm	Measurement only

CCR Vibration
Overall (X, Y, and Z axes)	<1 μm peak to peak at sample stage

Pump Down Time
Before CCR start-up (10^-3 torr)	20 min

Vacuum
Volume	8.7 L (530 in³)
Room temperature	10^-4 torr
At base temperature	10^-4 torr


Probe Tip Temperature Drift
	77 K to 300 K	Base temp to 300 K
X axis	TBD	TBD
Y axis	<5 μm	<5 μm
Z axis	TBD	TBD

Probe Arms
Travel X axis	51 mm (2 in)
Y axis	25 mm (1 in)
Z axis	18 mm (0.7 in)

Translation resolution X axis	20 μm
Y and Z axes	10 μm
Theta planarization (included with microwave probes)	±5°


Sample Space
Sample area	Up to 51 mm (2 in)
Sample thickness	Up to 12 mm (thicker samples may reduce probable area)
Working height of sample	89 cm (35 in) from floor

Distance to radiation shield	4.2 cm (1.65 in) from sample holder to bottom of viewport
Distance from vacuum chamber	7.2 cm (2.84 in) from sample holder to top of viewport

CCR Compressor Requirements

Compressor	CSW-71C	CSW-71D
Ambient temperature	5 °C to 28 °C; 28 °C to 35 °C with reduced capacity	5 °C to 28 °C; 28 °C to 35 °C with reduced capacity
Line voltage	208 VAC ±10%	380/400/415 VAC	460/480 VAC
Frequency	50/60 Hz	50 Hz	60 Hz
Phase	3-phase, delta	3-phase, delta
Power	8.3 kW max	8.5 kW max

Compressor Temperature	4 °C to 28 °C
Flow rate	7 L/min at 28 °C to 4 L/min at 4 °C
Inlet pressure	0.20 MPa (29 psig) to 0.69 MPa (100 psig)
Pressure drop	0.05 MPa (7 psig) at 4 L/min to 0.32 MPa (46 psig) at 10 L/min

Gas line length	6 m (19.7 ft) standard

Approvals	CE, UL

Frequency Range

ZN50 DC/RF probe frequency range
Tungsten with cryogenic coax cable	0 to 50 MHz^*
Tungsten with semirigid coax cable	0 to 1 GHz^*†
Paliney 7 with cryogenic coax cable	0 to 50 MHz^*
Paliney 7 with semirigid coax cable	0 to 1 GHz^*†
BeCu with cryogenic coax cable	0 to 50 MHz^*
BeCu with semirigid coax cable	0 to 1 GHz^*†

GSG microwave probe frequency range
Low frequency with K connector	0 to 40 GHz^*
Mid frequency with 2.4 mm connector	0 to 50 GHz^*
High frequency with 1.8 mm connector	0 to 67 GHz^*
Click here for probe & cable features

^*Selectable equipment
^†S21 > -10 dB up to 1 Ghz, except for a (-40 dB) spike between 400 MHz and 800 MHz depending on probe model and placement; S11 < -3 dB up to 1 GHz

Optical

Optical viewport—located on top lids	Ø54 mm (2.1 in) outer window and Ø51 mm (2 in) inner window
Outer, clear fused quartz	99% IR transmittance
Inner	IR absorbing with narrow band visible light transmittance

Optical resolution—monoscope
7:1 zoom	5 µm
12.5:1 zoom	4 µm^*
16:1 zoom	3 µm^*

^*Selectable equipment

Sample Holder (Chuck)

Maximum sample size—overall	Up to Ø51 mm (2 in) ^*
SH-1.25-G, Grounded chuck	Up to Ø31.8 mm (1.25 in) and 350 K
SH-1.25-I, Isolated chuck	Up to Ø31.8 mm (1.25 in) and 350 K^*
SH-1.25-C, Coaxial chuck	Up to Ø31.8 mm (1.25 in) and 350 K^*
SH-1.25-T, Triaxial chuck	Up to Ø31.8 mm (1.25 in) and 350 K^*
SH-2.00-G, Grounded chuck	Up to Ø51 mm (2 in) and 350 K^*
SH-2.00-C, Coaxial chuck	Up to Ø51 mm (2 in) and 350 K^*
SH-2.00-C-HT, Coaxial chuck, high temperature	Up to Ø51 mm (2 in) and 475 K^**
SH-2.00-T, Triaxial chuck	Up to Ø51 mm (2 in) and 350 K^*
Click here to select a sample chuck (holder)

^*Selectable equipment

^**Selectable equipment; high temperature coaxial sample holder limits low end temperature to 50 K (base); 55 K (control); requires option PS-HTA-CRTTP6 (purchased separately)

Standard Equipment

Closed cycle refrigerator — SHI RDK-408D2	4.5 K (base); 5 K to 475 K (control)
Sample stage temperature sensor	Lake Shore Model DT-670-SD-1.4H calibrated silicon diode
Cold head stage temperature sensor	Lake Shore Model DT-670C-CU silicon diode
Riser temperature sensor	Lake Shore Model DT-670C-CU silicon diode
Sample stage heater	100 W
Cold head stage heater	100 W
Riser heater	200 W (2 parallel heaters, 100 W each)

Cooled radiation shield and cooled IR-absorbing window above the sample
Diameter	13 cm (5 in)
Radiation shield temperature sensor	Lake Shore Model DT-670C-CU silicon diode
Material	Aluminum
Radiation shield heater	100 W
Removable top lid with viewpoint	Ø51 mm (2 in) window; Ø50 mm (1.97 in) viewing area
Sample access	13 cm (5 in)
Typical temperature	30 K to 35 K throughout the full-scale temperature range

Temprature controllers	Two Lake Shore Model 340s, one 3462 2-channel input card, and one Model 142 power supply (independent regulation of sample stage, cold head stage, riser, radiation shield, and probe arm temperature monitoring)

Electroless nickel plated aluminum vacuum chamber
Diameter	20.3 cm (8 in)
Seals	O-ring (370 Buna-N)
Removable top lid with clear fused quartz viewport	Ø63.5 mm (2.5 in) window
Viewable area	Ø54 mm (2.1 in)
Probe ports	Up to 6 surround the sample thermal radiation shield
Pump port	KF-40 with valve (pump sold separately)
Gauge port	KF-25 (gauge not included)
Gas port	0.25 in NPT with valve (inert gas only)
Over pressure safety	2 kPa (0.3 psi) pressure relief valve

Machined aluminum base plate (table)	63.0 cm × 50.8 cm (25 in × 20 in)

Support stand	Low vibration, welded steel stand with integrated passive vibration isolation and dampening—minimizes system vibration displacement at all frequencies

Up to six XYZ precision micro-manipulated probing stages

Probe arms, thermal radiation shields, stainless steel welded bellows, and feedthrough ports

Thermally linked probe mounts	Probe mounts and radiation shield are thermally anchored to the cold head; one probe mount includes a DT-670 series silicon diode temperature sensor installed and wired to a 6-pin feedthrough

Grounded sample holder	SH-1.25-G, accommodates up to a Ø31.8 mm (1.25 in) sample with a Ø25.4 mm (1 in) probe area to land all probes

Optics Zoom 70 monoscope	7:1 zoom with 5 µm resolution
Color CCD camera	S-video or composite output format
Swing arm	Optics can be manipulated to view any part of the sample or wafer, and can be retracted and swung away to allow access to the top of the vacuum chamber for sample exchange
Video monitor	High resolution, 17-inch
Sample illumination	Coaxial via fiber optic or ring light from an adjustable light source and power supply (must specify sample illumination at time of order) NOTE: Coaxial illumination is recommended for highly reflective materials

Instrument console

Basic tools, spares, and cleaning kit

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