| Closed cycle refrigerator — SHI RDK-408D2 |
4.5 K (base); 5 K to 475 K (control) |
| Sample stage temperature sensor |
|
| Cold head stage temperature sensor |
|
| Riser temperature sensor |
|
| Sample stage heater |
100 W |
| Cold head stage heater |
100 W |
| Riser heater |
200 W (2 parallel heaters, 100 W each) |
| |
| Cooled radiation shield and cooled IR-absorbing window above the sample |
| Diameter |
13 cm (5 in) |
| Radiation shield temperature sensor |
|
| Material |
Aluminum |
| Radiation shield heater |
100 W |
| Removable top lid with viewpoint |
Ø51 mm (2 in) window; Ø50 mm (1.97 in) viewing area |
| Sample access |
13 cm (5 in) |
| Typical temperature |
30 K to 35 K throughout the full-scale temperature range |
| |
| Temprature controllers |
Two Lake Shore Model 340s, one 3462 2-channel input card, and one Model 142 power supply (independent regulation of sample stage, cold head stage, riser, radiation shield, and probe arm temperature
monitoring) |
| |
| Electroless nickel plated aluminum vacuum chamber |
| Diameter |
20.3 cm (8 in) |
| Seals |
O-ring (370 Buna-N) |
| Removable top lid with clear fused quartz viewport |
Ø63.5 mm (2.5 in) window |
| Viewable area |
Ø54 mm (2.1 in) |
| Probe ports |
Up to 6 surround the sample thermal radiation shield |
| Pump port |
KF-40 with valve (pump sold separately) |
| Gauge port |
KF-25 (gauge not included) |
| Gas port |
0.25 in NPT with valve (inert gas only) |
| Over pressure safety |
2 kPa (0.3 psi) pressure relief valve |
| |
| Machined aluminum base plate (table) |
63.0 cm × 50.8 cm (25 in × 20 in) |
| |
| Support stand |
Low vibration, welded steel stand with integrated passive vibration isolation and dampening—minimizes system vibration displacement at all frequencies |
| |
| Up to six XYZ precision micro-manipulated probing stages |
| |
| Probe arms, thermal radiation shields, stainless steel welded bellows, and feedthrough ports |
| |
| Thermally linked probe mounts |
Probe mounts and radiation shield are thermally anchored to the cold head; one probe mount includes a DT-670 series silicon diode temperature sensor installed and wired to a 6-pin feedthrough |
| |
| Grounded sample holder |
SH-1.25-G, accommodates up to a Ø31.8 mm (1.25 in) sample with a Ø25.4 mm (1 in) probe area to land all probes |
| |
Optics
Zoom 70 monoscope |
7:1 zoom with 5 µm resolution |
| Color CCD camera |
S-video or composite output format |
| Swing arm |
Optics can be manipulated to view any part of the sample or wafer, and can be retracted and swung away to allow access to the top of the vacuum chamber for sample exchange |
| Video monitor |
High resolution, 17-inch |
| Sample illumination |
Coaxial via fiber optic or ring light from an adjustable light source and
power supply (must specify sample illumination at time of order) NOTE: Coaxial illumination is recommended for highly reflective materials |
| |
| Instrument console |
| |
| Basic tools, spares, and cleaning kit |
 |
 |