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Model CPX

Field-Upgradeable Cryogenic Probe Station

Quantity

Part Number

Description

CPX

Up to 6 micro-manipulated stage 2-inch wafer configurable probe station

Configurable Options:

Probes, probe tips, and cables are user configurable options and are required

Up to Six XYZ Precision Micro-manipulated Stages

MMS-09

Micro-manipulated stage with thermal radiation shields, stainless steel welded bellows, and feedthrough ports—includes probe arm and base; probes, probe tips, and cables sold separately

ZN50 DC/RF Probes

ZN50-55I

50 W stripline probe body mount

ZN50 Probe Tips (Alumina Ceramic Blade) (Click here for more information on Z50 probe tips)

ZN50R-03-W

3 μm radius, tungsten, up to 1 GHz*

ZN50R-10-W

10 μm radius, tungsten, up to 1 GHz*

ZN50R-25-W

25 μm radius, tungsten, up to 1 GHz*

ZN50R-03-P7

3 μm radius, Paliney 7, up to 1 GHz*

ZN50R-10-P7

10 μm radius, Paliney 7, up to 1 GHz*

ZN50R-25-P7

25 μm radius, Paliney 7, up to 1 GHz*

ZN50R-03-BECU

3 μm radius, beryllium copper, up to 1 GHz*

ZN50R-10-BECU

10 μm radius, beryllium copper, up to 1 GHz*

ZN50R-25-BECU

25 μm radius, beryllium copper, up to 1 GHz*

ZN50R-100-BECU

100 μm radius, beryllium copper, up to 1 GHz*

ZN50R-200-BECU

200 μm radius, beryllium copper, up to 1 GHz*

* Maximum frequency is 50 MHz with ZN50C-G or ZN50C-T cable. Maximum frequency is 1 GHz with MWC-10-00K-NM cable.

ZN50 DC/RF Cables (Click here for more information on Z50 cables)

ZN50C-G

Ultra-miniature cryogenic coaxial probe cable with SMA plug at probe end, BNC feedthrough, and grounded shield (shielded measurements to 50 MHz, max cable temp 350 K, max sample temp 675 K)

ZN50C-T

Ultra-miniature cryogenic coaxial probe cable with SMA plug at probe end to 3-lug triaxial feedthrough (for low leakage guarded measurements to 50 MHz, max cable temp 350 K, max sample temp 675 K)

MWC-09-00K

Semirigid microwave coaxial probe cable with K (SMA compatible) plug at probe end and K (SMA compatible) socket at feedthrough end (for high frequency measurements to 1 GHz*, max cable temp 350 K, max sample temp 675 K)

*S21 > -10 dB up to 1 GHz, except for a (-40 dB) spike between 400 MHz and 800 MHz depending on probe model and placement; S11 < -3 dB up to 1 GHz

GSG Microwave Probes (Click here for more information on GSG microwave probes)

GSG-050-40A-55I-E

K connector, 40 GHz, 50 μm pitch

GSG-100-40A-55I-E

K connector, 40 GHz, 100 μm pitch

GSG-150-40A-55I-E

K connector, 40 GHz, 150 μm pitch

GSG-200-40A-55I-E

K connector, 40 GHz, 200 μm pitch

GSG-250-40A-55I-E

K connector, 40 GHz, 250 μm pitch

GSG-050-50A-55I-E

2.4 mm connector, 50 GHz, 50 μm pitch

GSG-100-50A-55I-E

2.4 mm connector, 50 GHz, 100 μm pitch

GSG-150-50A-55I-E

2.4 mm connector, 50 GHz, 150 μm pitch

GSG-200-50A-55I-E

2.4 mm connector, 50 GHz, 200 μm pitch

GSG-250-50A-55I-E

2.4 mm connector, 50 GHz, 250 μm pitch

GSG-050-67A-55I-E

1.85 mm connector, 67 GHz, 50 μm pitch

GSG-100-67A-55I-E

1.85 mm connector, 67 GHz, 100 μm pitch

GSG-150-67A-55I-E

1.85 mm connector, 67 GHz, 150 μm pitch

GSG-200-67A-55I-E

1.85 mm connector, 67 GHz, 200 μm pitch

GSG-250-67A-55I-E

1.85 mm connector, 67 GHz, 250 μm pitch

GSG-TPM

Planarization module with upgraded manipulator to accommodate microwave probe rotation mechanism for in situ probe planarization (included with each GSG probe ordered with a probe station. When purchasing a GSG probe alone, GSG-TPM is not included)

GSG Microwave Cables (Click here for more information on GSG microwave cables)

MWC-09-00K

Semirigid microwave coaxial probe cable with K (SMA compatible) plug at probe end and K (SMA compatible) socket at feedthrough end (for measurements to 40 GHz, max cable temp 350 K, max sample temp 675 K)

MWC-09-185

Semirigid microwave coaxial probe cable with a 1.85 mm plug at probe and socket feedthrough ends (for measurements to 67 GHz, max cable temp 350 K, max sample temp 675 K)

MWC-09-240

Semirigid microwave coaxial probe cable with a 2.4 mm plug at probe and socket feedthrough ends (for measurements to 50 GHz, max cable temp 350 K, max sample temp 675 K)

Sample holders – Each base system includes one SH-1.25-G (grounded) sample holder (Click here for more information on sample holders)

SH-1.25-G

Grounded sample holder for up to 32 mm (1.25 in) diameter samples (475 K)

SH-1.25-I

Isolated sample holder for up to 32 mm (1.25 in) diameter samples (400 K)

SH-1.25-C

Coaxial sample holder for up to 32 mm (1.25 in) diameter samples (400 K)*

SH-1.25-T

Triaxial sample holder for up to 32 mm (1.25 in) diameter samples (400 K)**

SH-2.00-G

Grounded sample holder for up to 51 mm (2 in) diameter samples (475 K)

SH-2.00-C

Coaxial sample holder for up to 51 mm (2 in) diameter samples (400 K)*

SH-2.00-T

Triaxial sample holder for up to 51 mm (2 in) diameter samples (400 K)**

*Coaxial sample holders require one FT-BNC or FT-TRIAX feedthrough as listed below
**Triaxial sample holders require one FT-TRIAX feedthrough as listed below

FT-BNC

Coaxial feedthrough and coaxial cable, installed and wired

FT-TRIAX

Triaxial feedthrough and coaxial cable, installed and wired

Probe Station Options:

PS-HV-CPX

High vacuum option. Ensures that condensation does not accumulate in the sample environment during cooldown. This is critical for measuring organic semiconductors and for high Z and low current applications. Includes HVAC port, Varian V301 turbo pump kit, and related HVAC components. Vacuum specifications: radiation shields at room temperature with DUT at maximum temperature: 10^-5 torr; room temperature: 10^-6 torr; cold radiation shields with DUT at maximum temperature: 10^-6 torr; cold radiation shields with DUT at room temperature or below: 10^-7 torr

PS-LL-CPX

Load-lock assembly option. Allows sample exchange without warming the radiation shields or breaking vacuum,
significantly improving efficiency and throughput by reducing cycle time to roughly 1 h. Load-lock also allows samples to be exchanged under controlled environmental conditions. Overall temperature range limited from 10 K to 400 K when using this option.

PS-SSVAC-CPX

Stainless steel vacuum chamber and lid upgrade; supplied in place of standard aluminum vacuum chamber

PS-FOA

Fiber optic probe arm modification. Transmit or receive light or IR/UV radiation. Fiber optic terminated with SMA connector or compression feedthrough. (Fiber optic wire not included and priced separately based on requirements outlined in fiber optic worksheet. Fiber optic and probe cannot be used simultaneously.)

PS-Z16

16:1 zoom microscope upgrade; provides 4 μm resolution NOTE: consult Lake Shore for field upgrade

PS-HTA

High temperature sample stage for temperature operation from 20 K to 675 K. Integrated into the stage are a 51 mm (2 in) diameter coaxial sample holder, thermal standoff, calibrated PT-100 temperature sensor, heater, wiring, and cabling. The high temperature sample stage is interchangeable; standard sample holders can be used when the high temperature sample stage is removed. NOTE: reduces Z-axis travel to 12 mm; requires manual switching of 100 W radiation shield heater and sensor for closed loop control. Optional Model 336 temperature controller available for dedicated control loop.

PS-LT

2.0 K base temperature stage pumping option—includes system modifications, stainless steel flex hose for pump connection, and Varian DS402 rotary pump (12.3 CFM at 60 Hz with oil mist eliminator on output [with oil return], and inlet oil demister); 50 Hz operation may increase base temperature

PS-VLT-CPX

1.5 K base, 1.6 K to 400 K control temperature assembly—includes adapter, 4 K shield, and Model SH-1.00-G 25mm (1 inch) grounded sample holder NOTE: must be purchased in addition to PS-LT; maximum sample size limited to 25 mm (1 in) with this option—additional sample holders sold separately; 50 Hz operation may increase base temperature; replaces silicon diode sample stage temperature sensor with a Cernox™ RTD, limiting high end temperature of probe station to 400 K with or without assembly installed

PS-PLVI-25

Pump-line vibration isolator with NW 25 fittings, 1 m stainless steel bellows, clamps, and rings (placed between pump cart and system); requires one bag of cement. NOTE: for use with PS-LT or PS-HV-CPX

PS-V81DPC

Compact turbo pumping system—includes Varian V-81 turbo pump with oil free dry scroll backing pump, vacuum gauge for high vacuum, controller, and adaptors (specify 120 V/60 Hz or 220 V/50 Hz)

PS-PLVI-40

Pump-line vibration isolator—includes NW 40 fittings, 1 m stainless steel bellows, clamps, and rings (placed between pump cart and system); requires one bag of cement. NOTE: for use with PS-V81DPC

PS-LN2

Nitrogen Dewar with stainless fittings, gauges, and adaptors; allows LN₂ use with the LHe transfer line

PS-DPC

Automatic Dewar (gas) pressure controller, regulates Dewar liquid flow

PS-PVIS

Pneumatic vibration isolation system—gimbal piston isolator, actuators, and supports (isolator natural frequency: vertical 0.8 Hz, horizontal 1.0 Hz; isolation efficiency at 5 Hz: vertical 80 to 97%, horizontal 60 to 90%; efficiency at 10 Hz: vertical 90 to 99%, horizontal 70 to 95%); requires 40 psi nitrogen or air

PS-OAC

Oil-less air compressor for PS-TMC (only available in 120 V)

PA-SEN

Probe arm modification with temperature sensor installed and wired to a 6-pin feedthrough

PS-PAB-09

Probe arm and base

CS-5

Calibration substrate for GSG probes—pad size: 50 μm²; calibration type: SOLT (short-open-load-through), LRL (line-reflective-line), LRM (line-reflective-match); pitch range: 75 to 250 μm

CS-15

Calibration substrate for GSG probes—pad size: 25 μm²; calibration type: SOLT (short-open-load-through), LRL (line-reflective-line), LRM (line-reflective-match); pitch range: 40 to 150 μm

Special Request:

U.S. And Canada Only Shipping

At this time, we cannot ship or bill web orders outside of the United States and Canada. We cannot accept credit cards issued from a bank outside of the U.S. or Canada. If you are outside of the U.S. or Canada and would like export prices or order information, please contact your local sales representative by visiting http://www.lakeshore.com/com/sr.html.

Sales Tax: Lake Shore currently collects sales tax in the following states: AZ, CA, FL, IN, OH, SC WA

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Please submit your customized system for quotation by clicking on the button below. You will then be prompted to check your specifications, and once approved, these will be e-mailed to our sales department for a quote.

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