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Model LLTTP6 Features |
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- Load-lock sample exchange capabilities
- High stability operation from 10 K to 400 K
- Active cryogenic control of the cold head and radiation shield
- Measurements from DC to 67 GHz
- Top load accommodates up to 51 mm (2 in) diameter wafers; up to 12.7 mm (0.5 in) diameter wafers using load-lock
- Configurable with up to six micro-manipulated probe arms
- Probe arms with 3-axis adjustments and ±5° theta planarization
- Sample stage with ±5° in-plane rotation
- Cables, shields, and guards minimize electrical noise and thermal radiation losses
- High resolution optical system
- Options and accessories for customization to specific research needs
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Product Description |
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The Model LLTTP6 is a versatile, load-lock cryogenic micro-manipulated probe station. It is used for non-destructive testing of devices on full and partial wafers up to 51 mm (2 in) in diameter when top loaded, or 12.7 mm (0.5 in) in diameter using the load-lock assembly. The LLTTP6 is a platform for the measurement of electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a LLTTP6. A wide selection of probes, cables, sample holders, and options makes it possible to configure the LLTTP6 to meet your specific measurement applications. |
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The LLTTP6’s load-lock capability allows sample exchange without warming the vacuum chamber or breaking vacuum, significantly improving efficiency and throughput by reducing cycle time to roughly one hour. Load-lock also allows samples to be exchanged under controlled environmental conditions. |
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The LLTTP6 operates over a temperature range of 10 K to 400 K, and provides efficient temperature operation and
control with a continuous refrigeration system using either helium or nitrogen. Vapor-cooled shielding optimizes
efficiency and intercepts blackbody radiation before it reaches the sample. Two control heaters on the cold head
minimize temperature gradients across the sample and, along with the radiation shield heater, provide the probe station with fast thermal response. |
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The LLTTP6 is user configured with up to six ultra-stable micro-manipulated probe arms. Each arm provides precise 3-axis control of the probe position to accurately land the probe tip on device features. The sample stage provides inplane rotation to allow alignment of patterns with stage axes. Proprietary probe tips in a variety of sizes and materials minimize thermal mass and optimize electrical contacts to the device under test (DUT). Probe tips are thermally linked to the cold head to minimize heat transfer to the DUT. |
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For increased versatility, LLTTP6 options include vibration isolation systems, LN2 Dewar kit, higher magnification monoscopes, vacuum turbo pumping system, and probe arm fiber optic cable. |
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