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Model HVTTP6 Features |
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- High vacuum — to 10-7 torr
- High stability operation from 2 K to 475 K
- Active cryogenic control of the cold head and radiation shields
- Measurements from DC to 67 GHz
- Accommodates up to 51 mm (2 in) diameter wafers
- Configurable with up to six micro-manipulated probe arms
- Probe arms with 3-axis adjustments and ±5° theta planarization
- Sample stage with ±5° in-plane rotation
- Cables, shields, and guards minimize electrical noise and thermal radiation losses
- High resolution optical system
- Non-magnetic vibration isolation table
- Options and accessories for customization to specific research needs
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Product Description |
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The Model HVTTP6 is a versatile cryogenic, high vacuum micro-manipulated probe station used for non-destructive testing of devices on full and partial wafers up to 51 mm (2 in) in diameter. The HVTTP6 is a platform for measurement of electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a HVTTP6. A wide selection of probes, cables, sample holders, and options makes it possible to configure the HVTTP6 to meet your specific measurement applications. |
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The HVTTP6 provides vacuum to 10-7 torr. The high vacuum insures that condensation does not accumulate in the sample environment during cool down. This is critical for measuring organic semiconductors and for high Z and low current measurement applications. |
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The HVTTP6 operates over a temperature range of 4.2 K to 475 K. With options, the base temperature can be extended down to 2 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either helium or nitrogen. Vapor-cooled shielding optimizes efficiency and intercepts blackbody radiation before it reaches the sample. A control heater on the cold head minimizes temperature gradients across the sample and, along with the radiation shield heaters, provides the probe station with fast thermal response. |
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The HVTTP6 is user configured with up to six ultra-stable micro-manipulated probe arms. Each arm provides precise 3-axis control of the probe position to accurately land the probe tip on device features. The sample stage provides in-plane rotation to allow alignment of patterns with stage axes. Proprietary probe tips in a variety of sizes and materials minimize thermal mass and optimize electrical contacts to the device under test (DUT). Probe tips are thermally linked to the cold head to minimize heat transfer to the DUT. |
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For increased versatility, HVTTP6 options include a 2 K base temperature stage, vibration isolation systems, LN2 Dewar kit, higher magnification monoscopes, vacuum turbo pumping system, and probe arm fiber optic cable. |
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