4 Manipulated Stage System - Lake Shore Cryotronics, Inc.

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4 Manipulated Stage System

Total Basic System: Basic Full Wafer Cryogenic Manipulated Probe System, to include the following:

System base, 32" x 32" base plate, with pneumatic isolation support system to hold plate at 30-inch height. The base plate is constructed of 1" thick aluminum. The pneumatic isolation system is self-leveling, with a resonant frequency below 2 Hz. The steel base of the pneumatic system is optimized for the size of the base plate. Leveling actuators and interconnecting tubing are provided. All that is required for operation is a source of compressed air, regulated to a pressure between 45 and 100 PSI.
Vacuum chamber (10-inch diameter stainless steel) with four ports for manipulated probes, NW25 evacuation port, and spare NW25 port. The stainless steel vacuum chamber top has internal static radiation shielding, and a 4-inch quartz window (3.5 inch clear view). The stainless steel vacuum chamber bottom has static radiation shielding, a port mating to the bellows assembly (for sample position manipulation), and 19-pin feedthrough for control heater(s) and thermometry.
Four (4) probe manipulator stage assemblies: X-axis range is 125 mm, Y-axis range is 51 mm, Z-axis range is 16 mm. The X-axis utilizes 6-mm cross-roller bearing slides and is controlled with a 10-mm diameter x 2-mm pitch ACME lead-screw with low-friction supernut. A 2-inch diameter knob with laser-engraved readout provides high resolution and high torque to allow stages to be rapidly and precisely moved even when the vacuum force from the bellows loads the lead-screw. Micrometer heads and a preloaded pair of thrust bearings to provide an absolute position readout, zero-backlash, and positive positioning of stage in both directions actuate the Y- and Z-axes. The optional theta adjust utilizes an O-ring rotating seal, with Buna N type O-ring. The manipulator assemblies are located around the vacuum chamber in four equally spaced positions, rotated 45 degrees from the front and back position. This provides closer access to the chamber from the front, and preserves the geometry of 180 degree positions for the manipulators (useful for microwave applications).
For each manipulator assembly, a probe arm (1/2 inch diameter stainless steel tube) supports the probe mount, which is designed to accommodate low-leakage Desert ZN50 and microwave probes. One probe mount incorporates a 100Ω Pt thermometer to monitor the probe temperature. One probe feedthrough spool incorporates a 6-pin feedthrough for thermometer leads. The probe-mounts are thermally connected to the cold stage using flexible copper braids. This is done to minimize the temperature difference between the sample and the probes. Each probe-arm also includes a radiation shield thermally anchored to the main shield using flexible copper braids.
Wafer Stage manipulator assembly: X-Y range is 51 mm diameter. Theta (for aligning wafer die to manipulator X axis) has a range of ±5 degrees. The X and Y-axes utilizes 6-mm cross-roller bearing slides and are controlled with micrometer heads and a preloaded pair of thrust bearings to provide an absolute position readout, zero-backlash, and positive positioning of stage in both directions. The theta adjust utilizes an O-ring rotating seal, with Buna N type O-ring. Theta may be manually adjusted at atmosphere or in vacuum.
Probe and wafer manipulator assemblies are connected and sealed to the vacuum chamber using edge-welded bellows assemblies.
The refrigerator in the system is a continuous-transfer refrigerator that mounts through the wafer manipulator, from below the system. The system transfer line, with built in foot valve for flow regulation, is included. Operating temperatures are from 4.5 K to 475 K. A radiation shield, cooled by the helium exhaust from the cold plate, is supported from the bottom plate of the vacuum chamber. A platinum thermometer and 100 watt heater are mounted on the shield and wired to the 19-pin feedthrough on the bottom of the vacuum chamber. The shield has ports around its sides for probe arm access. Shield ports are blocked by super insulating curtains to minimize direct 300 K blackbody radiation on the sample. The top of the shield has a window with heat-absorbing glass (3-inch clear aperture) to minimize black body radiation loading of the wafer from above.
All wiring in the system will be polyimide-insulated (wiring capable of tolerating 200 °C). Thermometer wiring will be .005 inch diameter phosphor-bronze. Heater wiring will be .008 inch diameter copper.
Microscope system: Optem Zoom 70 Monoscope with 7:1 zoom, focus adjust, TV tube, coaxial illumination, high-resolution color CCD camera with power supply and S-video and NTSC output, high resolution 15 inch LCD color video monitor with S-video input, lamp housing with fiber-optic cable to scope, and video cable between camera and monitor. Microscope support: A vertical boom is mounted to the table, with adjustable collar to control the height. A two-shaft horizontal boom extends to allow manual front/back travel for full wafer coverage. The horizontal boom rotates on the vertical boom to allow left/right travel. A rotation lock is provided.
Sample-temperature thermometry and temperature control: A LakeShore Model 331 controller is used to read sample, shield, and probe temperatures. The probe and radiation shield temperatures are shared on the B channel. The sample temperature is measured with a calibrated DT-670 silicon diode thermometer, with calibration stored in the controller. The sample heating is 50 Watt, 25Ω heat, composed of two heaters in combination, symmetrically positioned in the cold stage below the sample holder. Wiring to the 19-pin feedthrough in the bottom of the vacuum chamber is included. A cable to the controller is included. An optional 100 Watt analog power supply may be purchased to control the radiation shield temperature for faster warm up and better sample temperature regulation at temperatures above 80K. The analog output of the 331 is used as the input to the power supply to form a second PID circuit to heat the radiation shield for fast warm-up to room temperature.
Complete system and component manuals

Options & Accessories:

Model ZN50 Probes (50 Ohm Stripline probes) & Related Cables

These probes have an SMA connector mounted directly to an alumina ceramic blade with a 50-Ohm Stripline routed to the probe contact. The ZN50 probe base also incorporates a pair of copper braids that connect to the sample stage to cool/heat the probe to the sample temperature. They feature an easily replaceable alumina blade assembly, with SMA connector and tip. (see ZNR-50) The most commonly used probe is the ZN50-25-BeCu. Three available tip radii are ideal for: contacting pads (25, 50, 100, 200 µm tip); large features (25 µm tip); contacting small features (10 µm tip); and contacting very small features (3 µm tip). Tungsten tips are recommended for aluminum pads. BeCu tips are recommended for all others. Other tips, such as Paliney 7 or gold plated BeCu, are also available. The material and tip radius (in µm) are incorporated into the part number. The standard probes work at frequencies to 2 GHz. The ZN50-25-HF-BeCu probe has an increased bandwidth of 5 GHz. Select your initial probes below, (4 probes required), and order other material types and spares from the ZN50R blade assemblies listed as spare or replacements later in this section.

Please indicate the quantity of each probe to be added.

ZN50-03-W
ZN50-10-W
ZN50-25-W

ZN50-10-BeCu
ZN50-25-BeCu
ZN50-25-HF-BeCu

ZN50-25-P7

Spare or replacement units, order as above, inserting an R after the ZN50, and specifying the radius and tip material as follows in example. I.e. a ZN50R-25-BeCu replacement blade would be a ZN50R-BeCu-25.

ZN50R-03-W
ZN50R-10-BeCu
ZN50R-10-W
ZN50R-25-BeCu
ZN50R-25-P7
ZN50R-25-W
ZN50R-25-HF-BeCu

Z50 Cables (Priced per probe arm)

Choose the cable configuration for your application.

Probe cable, type Cu-SS-36/50 Ultra miniature cryogenic coaxial cable with SMA plug at probe end, and BNC feedthrough. The shield is grounded. (Shielded measurements to 50 MHz, 475 K.)

Probe cable, type Cu-SS-36/50 Ultra miniature cryogenic coaxial cable with SMA connector at probe end to 3-lug triax feedthrough. (For low-leakage guarded measurements to 50 MHz, 475 K.)

Probe cable, .085 stainless semi-rigid microwave coaxial cable with SMA plug at probe end and SMA jack at feed through end. (For measurements to 3 GHz, 425 K.)

Model GSG Probes (Coplanar waveguide probes) & Related Cables

These probes are made to Desert Cryogenics specifications by GGB Industries. They have optimized, low-thermal-conductivity coax leading to low-thermal-conductivity tips, which minimize the thermal impact of the probe. The contacts geometry is ground-signal-ground (GSG), with pitch (spacing), which is user-specified, usually 100 µm or 150 µm. The probe is specially manufactured to Desert Cryogenics proprietary design, with a copper braid assembly to cool the probe to near sample temperature. The contacts are held in fixed and precise positions by epoxy encapsulation, and the center pin position is known to be stable on repeated thermal cycling. The probes are available in three bandwidths: 0-40 GHz probes have K-connectors; 0-50 GHz have 2.4 mm connectors; and 0-67 GHz probes have 1.8 mm connectors. The model number for a probe is GSG-xxx-yy, where xxx is the pitch in microns and yy is the bandwidth in GHz. For example a 50 GHz bandwidth probe with 150-µm pitch is a GSG-150-50. GSG probes are geometrically interchangeable with Z50 probes. Microwave probes are limited to 400 K.

Model GSG-xxx-40 microwave probe
Model GSG-xxx-50 microwave probe
Model GSG-xxx-67 microwave probe
xxxx = 50, 100 or 150 µm. For other pitches, consult Desert

Theta planarization module, upgrade probe manipulator to accommodate microwave probe rotation mechanism for in-situ probe planarization (Microwave cable and probe sold separately).

GSG Cables (Priced per probe arm)

These cables are cryogenically stabilized before assembly. The cables also include a compression-seal vacuum feed through which is a lossless feed through. The low-loss cables have higher thermal losses but lower microwave losses. The cable is semi rigid, with stainless steel outer jacket, silver plated BeCu inner conductor and Teflon dielectric. The low-loss cable has a copper film outside the dielectric.

Model K-085-K	(40 GHz bandwidth, 400 K)
Model K-085LL-L	(40 GHz bandwidth, low loss, 400 K)
Model 2.4-085-2.4	(50 GHz bandwidth, 400 K)
Model 2.4-085LL-2.4	(50 GHz bandwidth, low loss, 400 K)
Model 1.8-085-1.85	(67 GHz bandwidth, 400 K)
Model 1.8-085LL-1.85	(67 GHz bandwidth, low loss, 400 K)

Sample Holders

Each Base system includes one TT-CS-4G sample holder. These are specially constructed of Molybdenum to match the thermal expansion of Silicon and reduce stresses in the substrates at low temperatures. All sample holders have gold plated surfaces. Upgrades are available at the difference in price of the holder. The second price (F/T) for -C and -T holders, is the price for feedthrough and coax installation for that holder.

Model TT-CS-4G	Grounded holder for up to 100 mm samples (475 K)
Model TT-CS-4C	Coaxial holder for up to 100 mm samples (400 K)
Model TT-CS-4T	Triaxial holder for up to 100 mm samples (400 K)

System Options and Accessories

Turbo - pumping system, Varian V-70 Turbo pump cart, with DS 102 backing pump, vacuum gauging for high vacuum and foreline, controller, and adaptors.

Modify probe arm to hold cleaved fiber optic at sample end, add compression feed through to fiber patch cord. Cleaved bundle normal to sample.

NW25 fitting on chamber, with purge valve and clamp hardware.

Microscope upgrade to 12.5:1 zoom system, 1x TV tube for 4 µm* resolution
Upgrade to 16:1 zoom system, with 2x TV tube for 3 µm* resolution
*field systems with extended chamber heights may vary, decreasing resolution.

Nitrogen Dewar with stainless fittings, gauges, and adapters, to allow LN2 use with Helium transfer line.

Pump-line vibration isolator with NW-25 flex hose, clamp and ring. (cement required)

Radiation shield heater, thermometer, wiring, and cable modifications.

Power supply for above, to amplify the controller analog output and drive the 100W shield heater. Includes power cable and cable between the LakeShore controller and power supply. (Requires shield heater/thermometer option above.)

Utilities Required:

The controller, monitor, CCD, light source, and the auxiliary power supply can all be operated on another 115V single phase circuit.

Compressed air: Compressed air for the pneumatic isolation must be regulated anywhere from 40 psi to 100 psi. Consumption is negligible.

Dry nitrogen: For backfilling the chamber, a source of dry nitrogen is recommended.

For the pump, it's best to route the exhaust to a utility corridor or a vent hood.

Footprint:

The system itself occupies a 32 inch by 32 inch square. Access to the corners of the square is required for adjustment of the manipulators. Access on one side of the system is needed for the helium transport Dewar. The pump station has a footprint of 15 inch by 22 inch (380 mm x 560 mm). Space for the video monitor, light source, temperature controller and auxiliary power supply are needed next to the system.

Warranty: System and components are warranted for one year, parts and workmanship.
Vacuum system, optical system, and temperature controller are warranted through their respective manufacturers.

Delivery: quoted on an ARO basis
FOB: Tucson, AZ

Please submit your customized system for quotation by clicking on the button below. You will then be prompted to check your specifications and once approved, these will be emailed to our sales department for a quote.

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